Comparison of optical, electrical, and surface characteristics of InGaN thin films at non-flow and small nitrogen flow cases

Asim Mantarcı

DOI: https://doi.org/10.1007/s11082-021-03203-4

IF: 3

2021-08-29

Optical and Quantum Electronics

Abstract:<p class="a-plus-plus">InGaN films in the non-flow and a small flow of nitrogen cases were fabricated by the RFMS (Radio Frequency Magnetron Sputter) method to compare crucial physical characteristics of its material. From the XRD analysis, application of small nitrogen flow in the InGaN thin film growth has been observed to result in changes in the crystal size, texture coefficient, and crystal structure parameters of the film. AFM results showed both films obtained have tightly packed granular, and almost homogeneous, and Nano-structural properties, but they are different in roughness, as increased by applying small nitrogen flow. Optical conductance peaks of the material in non-flow and small flow case were <span class="a-plus-plus inline-equation id-i-eq1"><span class="a-plus-plus equation-source format-t-e-x"><span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="36.949ex" height="3.176ex" style="vertical-align: -0.838ex;" viewBox="0 -1006.6 15908.5 1367.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-31"></use> <use xlink:href="#MJMAIN-2E" x="500" y="0"></use> <use xlink:href="#MJMAIN-33" x="779" y="0"></use> <use xlink:href="#MJMAIN-39" x="1279" y="0"></use> <use xlink:href="#MJMAIN-35" x="1780" y="0"></use> <use xlink:href="#MJMAIN-37" x="2280" y="0"></use> <use xlink:href="#MJMAIN-D7" x="3003" y="0"></use><g transform="translate(4003,0)"> <use xlink:href="#MJMAIN-31"></use> <use xlink:href="#MJMAIN-30" x="500" y="0"></use><g transform="translate(1001,393)"> <use transform="scale(0.707)" xlink:href="#MJMAIN-31"></use> <use transform="scale(0.707)" xlink:href="#MJMAIN-30" x="500" y="0"></use></g></g><g transform="translate(5812,0)"> <use xlink:href="#MJMAIN-61" x="0" y="0"></use> <use xlink:href="#MJMAIN-6E" x="500" y="0"></use> <use xlink:href="#MJMAIN-64" x="1057" y="0"></use></g><g transform="translate(7426,0)"> <use xlink:href="#MJMAIN-31"></use> <use xlink:href="#MJMAIN-2E" x="500" y="0"></use> <use xlink:href="#MJMAIN-31" x="779" y="0"></use> <use xlink:href="#MJMAIN-34" x="1279" y="0"></use> <use xlink:href="#MJMAIN-39" x="1780" y="0"></use> <use xlink:href="#MJMAIN-36" x="2280" y="0"></use></g> <use xlink:href="#MJMAIN-D7" x="10429" y="0"></use><g transform="translate(11430,0)"> <use xlink:href="#MJMAIN-31"></use> <use xlink:href="#MJMAIN-30" x="500" y="0"></use><g transform="translate(1001,393)"> <use transform="scale(0.707)" xlink:href="#MJMAIN-31"></use> <use transform="scale(0.707)" xlink:href="#MJMAIN-30" x="500" y="0"></use></g></g> <use xlink:href="#MJMAIN-28" x="13239" y="0"></use> <use xlink:href="#MJMAIN-53" x="13628" y="0"></use> <use xlink:href="#MJMAIN-2F" x="14185" y="0"></use> <use xlink:href="#MJMAIN-6D" x="14685" y="0"></use> <use xlink:href="#MJMAIN-29" x="15519" y="0"></use></g></svg></span></span></span>, showed a decrement in optical conductance by small nitrogen flow. In the same manner, electrical conductance peaks of the material in non-flow and small flow case were <span class="a-plus-plus inline-equation id-i-eq2"><span class="a-plus-plus equation-source format-t-e-x"><span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="33.851ex" height="3.176ex" style="vertical-align: -0.838ex;" viewBox="0 -1006.6 14574.5 1367.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMAIN-35"></use> <use xlink:href="#MJMAIN-2E" x="500" y="0"></use> <use xlink:href="#MJMAIN-32" x="779" y="0"></use> <use xlink:href="#MJMAIN-35" x="1279" y="0"></use> <use xlink:href="#MJMAIN-31" x="1780" y="0"></use> <use xlink:href="#MJMAIN-32" x="2280" y="0"></use> <use xlink:href="#MJMAIN-D7" x="3003" y="0"></use><g transform="translate(4003,0)"> <use xlink:href="#MJMAIN-31"></use> <use xlink:href="#MJMAIN-30" x="500" y="0"></use><g transform="translate(1001,393)"> <use transform="scale(0.707)" xlink:href="#MJMAIN-31"></use> <use transform="scale(0.707)" xlink:href="#MJMAIN-32" x="500" y="0"></use></g></g><g transform="translate(5812,0)"> <use xlink:href="#MJMAIN-61" x="0" y="0"></use> <use xlink:href="#MJMAIN-6E" x="500" y="0"></use> <use xlink:href="#MJMAIN-64" x="1057" y="0"></use></g><g transform="translate(7426,0)"> <use xlink:href="#MJMAIN-35"></use> <use xlink:href="#MJMAIN-2E" x="500" y="0"></use> <use xlink:href="#MJMAIN-32" x="779" y="0"></use> <use xlink:href="#MJMAIN-32" x="1279" y="0"></use> <use xlink:href="#MJMAIN-33" x="1780" y="0"></use> <use xlink:href="#MJMAIN-36" x="2280" y="0"></use></g> <use xlink:href="#MJMAIN-D7" x="10429" y="0"></use><g transform="translate(11430,0)"> <use xlink:href="#MJMAIN-31"></use> <use xlink:href="#MJMAIN-30" x="500" y="0"></use><g transform="translate(1001,393)"> <use transform="scale(0.707)" xlink:href="#MJMAIN-31"></use> <use transform="scale(0.707)" xlink:href="#MJMAIN-32" x="500" y="0"></use></g></g> <use xlink:href="#MJMAIN-28" x="13239" y="0"></use> <use xlink:href="#MJMAIN-53" x="13628" y="0"></use> <use xlink:href="#MJMAIN-29" x="14185" y="0"></use></g></svg></span></span></span>, showed a decrement in electrical conductance by small nitrogen flow. In addition, the electrical conductivity of the InGaN material has been obtained at higher than the optical conductivity value of the InGaN material in both cases. Also, it was noticed that direct allowed optical band gap energy non-flow and small flow cases were 2.65 and 2.69&nbsp;eV, displayed increased by applied small nitrogen flow. Essentially, many noteworthy physical properties such as crystalline size, texture coefficient, optical/electrical conductivity, the surface roughness of the films have been compared and studied for the non-flow and a small flow of nitrogen cases. Therefore; a better understanding of the structural/crystal and electrical characteristics of the InGaN film by applying/optimizing different growth conditions will be able to pave the way for InGaN device studies.</p><svg xmlns="http://www.w3.org/2000/svg" style="display: none;"><defs id="MathJax_SVG_glyphs"><path stroke-width="1" id="MJMAIN-31" d="M213 578L200 573Q186 568 160 563T102 556H83V602H102Q149 604 189 617T245 641T273 663Q275 666 285 666Q294 666 302 660V361L303 61Q310 54 315 52T339 48T401 46H427V0H416Q395 3 257 3Q121 3 100 0H88V46H114Q136 46 152 46T177 47T193 50T201 52T207 57T213 61V578Z"></path><path stroke-width="1" id="MJMAIN-2E" d="M78 60Q78 84 95 102T138 120Q162 120 180 104T199 61Q199 36 182 18T139 0T96 17T78 60Z"></path><path stroke-width="1" id="MJMAIN-33" d="M127 463Q100 463 85 480T69 524Q69 579 117 622T233 665Q268 665 277 664Q351 652 390 611T430 522Q430 470 396 421T302 350L299 348Q299 347 308 345T337 336T375 315Q457 262 457 175Q457 96 395 37T238 -22Q158 -22 100 21T42 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