A standard used for probe-tip diameter evaluation in surface roughness measurements using metrological atomic force microscope
Ichiko Misumi,Ryosuke Kizu,Kentaro Sugawara,Akiko Hirai,Satoshi Gonda
DOI: https://doi.org/10.1088/1361-6501/ab8e69
IF: 2.398
2020-06-25
Measurement Science and Technology
Abstract:Recently metrological atomic force microscopes (metrological AFMs) have been used for surface roughness measurements. The National Metrology Institute of Japan (NMIJ), AIST, provides a profile surface roughness calibration service using a metrological AFM based on ISO 19606:2017. This international standard requires evaluation of probe-tip diameter D and error in roughness measurements by using a standard plate with needle-shaped spikes before conducting surface roughness measurements. However, the conventional standard plate has several problems: (1) the needle-shaped spikes are too high, (2) the distance between spikes is too long, and (3) the spike curvature radius is not small enough, compared with AFM probe-tip size, which may lead to considerable uncertainty derived from probe-tip error evaluation. This study examined a new type of commercially-available standard plate as a candidate for probe-tip diameter evaluation. It features lower spike height and shorter distance between spikes in order to avoid probe-tip wear caused by repeated scanning. This study demonstrated that the overestimated uncertainty derived from probe-tip error evaluation can be corrected by using the new standard plate.
engineering, multidisciplinary,instruments & instrumentation