Abstract:In the next years, one of the biggest challenges for optoelectronic devices will be the necessity to provide a suitable and reliable alternative to the use of transparent conducting oxide (TCO) like Indium Thin Oxide (ITO) as transparent electrodes. We recently demonstrated a promising fully laser-based method to produce transparent conductive electrodes only made of pure carbon materials. In a first step, we use the Pulsed Laser Deposition (PLD) to synthetize high performance Diamond-Like Carbon (DLC), an amorphous pure carbon material composed of a mixture of sp 2 (graphitic) sp 3 (diamond) hybridized carbon atoms. DLC thin films show very interesting properties comparable to those of diamond, like a high transparency in the visible range, high wear resistance, biocompatibility, chemical inertness and high electrical insulation. DLC also presents one particularity compared to diamond which its relative high opacity in the UV range. This feature is used in a second step to perform an UV laser surface treatment to graphitize the very first atomic layers of the DLC thin film. DLC opacity at treatment wavelength will help to restrict the laser interaction at the surface and will break dominant diamond bindings, allowing carbon atoms to reorganize into its stable form, forming by their way a Thin Graphitic Layer (TGL). Raman spectroscopy (RS) and X-ray Photoemission Spectroscopy (XPS) perform before and after laser annealing clearly demonstrate the DLC surface graphitization kinetic. Transmittance and surface conductivity measurement show very promising results and performances that can clearly compete with those of ITO. In addition to all these analyses, this pure laser process will be fully compatible with standard microelectronic technological steps and will have a low ecological footprint compared to other much heavier processes.

Structural and Electrical Characterization of Highly Tetrahedral-Coordinated Diamond-Like Carbon Films Grown by Pulsed-Laser Deposition

N-Type Doping of Highly Tetrahedral Diamond-Like Amorphous Carbon

Properties of Tetrahedral Amorphous Carbon Prepared by Vacuum Arc Deposition

Optical and Electronic-Properties of Amorphous Diamond

Investigation of laser-induced changes in structural and optoelectrical properties of pulsed laser-deposited Diamond-Like Carbon layers

Electronic-Properties of Semiconducting Diamond-Like Carbon Diamond

Electron-Beam Defined Delamination and Ablation of Carbon-Diamond Thin-Films on Silicon

Properties Of Filtered-Ion-Beam-Deposited Diamond-Like Carbon As A Function Of Ion Energy (Vol 48, Pg 4777, 1993)

Tetrahedral Amorphous-Carbon Properties and Applications

A New Reactive Pulsed Laser Ablation Technique for the Deposition of Hard Carbon and Carbon-Nitride Thin Films

Influence of Carbon Ion Energy on Properties of Highly Tetrahedral Diamond-Like Carbon

Electronic and optical applications of diamond-like carbon

Diamond-like Carbon Thin Films Prepared by ECR Argon Plasma Assisted Pulsed Laser Deposition

Highly luminescent hydrogenated amorphous carbon (a-C:H) thin films

Carbon - Silicon Heterojunction Diodes Formed by CH4/ Ar Rf Plasma Thin Film Deposition on Si Substrates

Electronic density of states in highly tetrahedral amorphous carbon

Superlattice Structures Based on Amorphous Carbon

Diamond-Like Carbon Thin-Film Deposition Using A Magnetically Confined Rf Pecvd System

Influence of Ion Energy and Substrate Temperature on the Optical and Electronic Properties of Tetrahedral Amorphous Carbon (Ta-C) Films

Growth, Properties, and Applications of Pulsed Laser Deposited Nanolaminate Ti3AlC2 Thin Films

Cross-Sectional Structure Of Tetrahedral Amorphous Carbon Thin Films