Tetrahedral Amorphous-Carbon Properties and Applications

DR MCKENZIE,Y YIN,NA MARKS,CA DAVIS,E KRAVTCHINSKAIA,BA PAILTHORPE,GAJ AMARATUNGA
DOI: https://doi.org/10.1016/0022-3093(93)91191-5
IF: 4.458
1993-01-01
Journal of Non-Crystalline Solids
Abstract:Tetrahedral amorphous carbon (ta-C) is a new semiconductor which is able to accept dopants and shows photoconductivity. It may be conveniently deposited at room temperature onto plastic substrates. It is found to be stable at temperatures up to 700°C. A computer based molecular dynamics study is used to illustrate the generation of compressive stress which favours the formation of ta-C. Results for photoconductivity and dark conductivity of pure and doped materials are presented. The film thickness dependence of film properties are correlated with the results of electron energy loss spectroscopy. The results suggest that ta-C JFET devices may perform better than MOSFET devices.
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