Evolution of Sp2 Bonding with Deposition Temperature in Tetrahedral Amorphous Carbon Studied by Raman Spectroscopy

M Chhowalla,AC Ferrari,J Robertson,GAJ Amaratunga
DOI: https://doi.org/10.1063/1.126050
IF: 4
2000-01-01
Applied Physics Letters
Abstract:Two transitions in the bonding are found in tetrahedral amorphous carbon (ta-C) films as a function of deposition temperature. The total sp3 fraction shows a sharp decrease at a transition temperature of order 250 °C. In contrast, visible Raman finds that the sp2 sites show a gradual ordering into the graphitic clusters through the sharp bonding transition. The optical gap and resistivity show a similar, gradual transition. This indicates that the sp2 cluster size determines the optical gap, even when the sp2 content does not change. The Raman I(D)/I(G) peak ratio is found to vary inversely with the square of the gap.
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