Abstract:Localized CO2 laser repairing of surface damage on fused silica optics has been successfully applied in high-power laser system in the field of controllable nuclear fusion. In order to accurately predict the surface topography evolution and to reveal the intrinsic physical mechanism during the process of laser mitigation, experiments of localized CO2 laser mitigation were firstly carried out to analyze the features of mitigated craters under different laser powers. Then a multi-physics coupled mathematical model was developed based on the fluid control equation, heat and mass transfer equation and material phase transition kinetics to investigate the thermodynamic and kinetic behaviors of laser interaction with silica. The model considered the effects of Marangoni convection, gravity, capillary force and vaporization recoil pressure, as well as the nonlinear variation of physical parameters of silica material with respect to temperature. The results showed that with the increase of laser power, the material ablation and the appearance of raised rim occurred simultaneously. The depth of the mitigated crater increased sharply when the threshold for material ablation was attained, while the lateral dimension increased linearly. The vaporization recoil pressure was found to be the dominant factor for the formation of Gaussian crater with the raised rim feature. The capillary force caused the material at the edge of the molten pool to have a tendency to reflow after laser shutting down, but it was too small to change the surface topography. This work could significantly contribute to the understanding of laser mitigation process, which laid the foundation for the accurate prediction and evaluation of surface quality of CO2 laser repaired fused silica surface.

Molecular dynamics simulation study on ablation of silicon by water-jet-guided laser

Simulation and Experimental Research on Water-Jet Guided Laser Cutting Silicon Wafer

Numerical investigations of water jet-guided laser cutting of silicon

Heating and Material Removal Process in Hybrid Laser-Waterjet Ablation of Silicon Substrates

Influence of liquid environments on femtosecond laser ablation of silicon

Hydrodynamic Simulation of Silicon Ablation by Ultrashort Laser Irradiation

An Investigation of Hybrid Laser–waterjet Ablation of Silicon Substrates

Nanosecond pulsed laser ablation of silicon—finite element simulation and experimental validation

Computational and Experimental Study of Nanosecond Laser Ablation of Crystalline Silicon

Simulation on Drilling with Water-Jet Guided Laser

Linearly Scaling Molecular Dynamic Modeling to Simulate Picosecond Laser Ablation of a Silicon Carbide Crystal

Study on Ablation Threshold of Fused Silica by Liquid-Assisted Femtosecond Laser Processing.

Numerical Simulation of Vaporization Effect of Long Pulsed Laser Interaction with Silicon

Toward Little Heat-Affected Area of Fused Silica Materials Using Short Pulse and High Power CO2 Laser

Laser-Assisted Waterjet Micro-Grooving of Silicon Wafers for Minimizing Heat Affected Zone

Molecular dynamics study of electronic temperature effects on the laser ablation of silicon

Spatio-temporal multi-scale observation of the evolution mechanism during millisecond laser ablation of SiC f /SiC

A Novel Laser-Accumulated Plasma Model with an Effective Beam Profile Based on Experiments with Mj-Level Femtosecond Pulses Targeting for Analysis of the Ablation Thresholds and Ablated Channel Widths on Fused Silica Surfaces

Spatio-temporal multi-scale observation of the evolution mechanism during millisecond laser ablation of SiCf/SiC

Experimental and Theoretical Investigation of Localized CO2 Laser Interaction with Fused Silica During the Process of Surface Damage Mitigation

Investigation of mechanism and surface morphology on the femtosecond laser ablation of silicon nitride under different auxiliary processing environments