Influence of CVD diamond growth conditions on nitrogen incorporation

M.A. Lobaev,A.M. Gorbachev,S.A. Bogdanov,A.L. Vikharev,D.B. Radishev,V.A. Isaev,V.V. Chernov,M.N. Drozdov
DOI: https://doi.org/10.1016/j.diamond.2016.12.011
IF: 3.806
2017-02-01
Diamond and Related Materials
Abstract:Nitrogen incorporation during the process of CVD diamond synthesis was studied at different growth conditions: nitrogen flow, substrate temperature, methane content. High nitrogen concentration >1019cm−3 was obtained using (100)-oriented HPHT substrates. We also demonstrated the growth of the ultra-thin nitrogen doped delta layers with peak nitrogen concentration ~1019cm−3 and thickness ~3nm. It is shown, that nitrogen delta doping allows the creation of high-density NV-center ensembles with nanometer-precision depth control.
materials science, multidisciplinary,physics, applied, condensed matter, coatings & films
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