Determination of carbon-related trap energy level in (Al)GaN buffers for high electron mobility transistors through a room-temperature approach

Xin Chen,Yaozong Zhong,Yu Zhou,Hongwei Gao,Xiaoning Zhan,Shuai Su,Xiaolu Guo,Qian Sun,Zihui Zhang,Wengang Bi,Hui Yang
DOI: https://doi.org/10.1063/5.0031029
IF: 4
2020-12-28
Applied Physics Letters
Abstract:A room-temperature method to determine the trap energy levels in the carbon-doped (Al)GaN buffers is developed via a transient current measurement on the AlGaN/GaN high electron mobility transistors under back-gate voltages combined with a measurement of the buffer vertical leakage. Under high back-gate voltages, a linear relationship is obtained between the trap energy levels and the square roots of electric field strength, suggesting that the vertical conduction in the C-doped buffer follows the Poole–Frenkel law. The trap energy level in C-doped Al<sub>0.07</sub>Ga<sub>0.93</sub>N is finally determined to be 1.1 eV through the established room-temperature approach, while that in C-doped GaN is extracted to be 0.9 eV, both of which are related to the carbon impurities.
physics, applied
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