Optimizing Forward Drop and Reverse Leakage Trade-Off in AlGaN/GaN Lateral Diode with Schottky-Metal-Insulator-Semiconductor Cascode Anode

Fangzhou Wang,Changhong Gao,Guojian Ding,Cheng Yu,Zhuocheng Wang,Xiaohui Wang,Qi Feng,Ping Yu,Peng Zuo,Yang Wang,Wanjun Chen,Haiqiang Jia,Bo Zhang,Hong Chen,Zeheng Wang
DOI: https://doi.org/10.1002/pssa.202400338
2024-01-01
Abstract:Herein, AlGaN/GaN lateral diode with the Schottky-Metal-Insulator-Semiconductor (MIS) cascode anode (CALD) to optimize forward voltage drop (V-F) and reverse leakage current (I-LEAK) trade-off is proposed. In the CALD device, a normally-on Ni/HfO2/AlGaN MIS-controlled channel as well as a lateral Ni/GaN Schottky contact are cascoded at the anode. The designed normally-on MIS-controlled channel has high electron concentration at forward bias and prevents high electric-field at reverse bias, which ensure both low V-F and low I-LEAK. Meanwhile, the Ni/GaN Schottky contact with a high Schottky barrier height further suppresses the I-LEAK. As a result, the fabricated CALD demonstrates an optimized V-F-I-LEAK trade-off relationship, including a low V-F of 1.6 V and a low I-LEAK of 5.2 x 10(-8) A mm(-1) (at reverse voltage of 400 V), together with a high breakdown voltage (BV) >700 V. These high performances suggest that the CALD can be a promising candidate for GaN power diode applications requiring a better V-F-I-LEAK trade-off.
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