Ga$_{\text{2}}$O$_{\text{3}}$ Vertical FinFET With Integrated Schottky Barrier Diode for Low-Loss Conduction
Xiaorui Xu,Yicong Deng,Titao Li,Xiaohui Xu,Dan Yang,Minmin Zhu,Haizhong Zhang,Xiaoqiang Lu
DOI: https://doi.org/10.1109/ted.2024.3365078
IF: 3.1
2024-01-01
IEEE Transactions on Electron Devices
Abstract:In this work, a novel gallium oxide (Ga $_{\text{2}}$ O $_{\text{3}}\text{)}$ vertical FinFET with integrated Schottky barrier diode (SBD-FinFET), which achieves low conduction losses, is proposed. In the reverse conduction state, the integrated SBD can provide additional low-resistance path to conduct reverse current, hence achieving low reverse conduction loss. In the switching state, the SBD-FinFET can also reduce gate–drain capacitance and gate charge, thus featuring fast switching speed and low switching losses. Furthermore, in the other states, the integrated SBD of the SBD-FinFET is in the OFF state, which does not significantly affect the device characteristics. The well-calibrated simulation results show that when compared with the state-of-the-art FinFET with integrated Fin channel and ohmic contact diode (FOD-FinFET), the SBD-FinFET can reduce reverse conduction loss, turn-on loss, and turn-off loss by 25%, 19%, and 22%, respectively, while other characteristics retain almost unchanged.
engineering, electrical & electronic,physics, applied