Reverse-Blocking Normally-OFF GaN Double-Channel MOS-HEMT with Low Reverse Leakage Current and Low ON-State Resistance

Jiacheng Lei,Jin Wei,Gaofei Tang,Zhaofu Zhang,Qingkai Qian,Zheyang Zheng,Mengyuan Hua,Kevin J. Chen
DOI: https://doi.org/10.1109/led.2018.2832180
IF: 4.8157
2018-01-01
IEEE Electron Device Letters
Abstract:An MOS field plate-protected Schottky-drain (gated Schottky-drain) is successfully integrated on a double-channel AlGaN/GaN MOS-HEMT to provide reverse blocking capability. The leakage suppression MOS field plate is deployed on the etched upper GaN channel layer after a barrier fully recess process, leading to a low reverse OFF-state leakage current of -20nA/mm (at -100 V). The drainmetal is deployed adjacent to the MOS field plate, contacting the upper MOS-channel and lower heterojunction channel from the sidewall. A metal-2DEG Schottky contact with a low turn-ON voltage of 0.5 V is achieved. Since the lower channel (below the MOS field plate) is separated from the etched surface of upper GaN channel layer, a high-conductivity MOS-gated channel with a sheet resistance of 806 Omega/Square is obtained. The device exhibits a threshold voltage of + 0.6 V (at 10 mu A/mm and +1.9 V from linear extrapolation) and an ON-resistance of similar to 18 Omega.mm. Besides, a high forward (and reverse) breakdown voltage of 790 V (and -656 V, all at 10 mu A/mm) is achieved.
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