1‐1: Oxide Semiconductor Thin‐Film Transistors with High Mobility and Stability

Guowen Yan,Dejian Wang,Xiaoqi Sun,Pan Wen,Cong Peng,Lin Xu,Lidong Ding,Fa-Hsyang Chen,Xifeng Li,Wangfeng Xi,Rubo Xing,Junfeng Li
DOI: https://doi.org/10.1002/sdtp.16981
2024-01-01
SID Symposium Digest of Technical Papers
Abstract:This paper presents a oxide thin film transistors with high mobility by a new fabricate method. The high mobility TFT with ultra‐high mobility of 55cm 2 /Vs has been obtained, and the PBTS and NBTS has also been optimized.
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