Structure and Tribological Properties of TiN_x/DLC Filmsprepared by Plasma Based Ion Implantation

Xia Li
IF: 1.8
2003-01-01
Materials Science and Technology
Abstract:The structure and tribological properties of TiNx/DLC films was investigated. Plasma based ion implantation (PBII), a rapidly developing technique which improves the adhesion of DLC coatings to steel for creating a compositionally graded interface, was used to prepare TiNx/DLC multilayer films on 30CrMnSi steel at nearly room temperature. The structural features of TiNx/DLC films were examined by X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. Tribological properties between TiNx/DLC films and GCr15 steel ball were investigated in ball-on-disk tribometer under ambient air. It was shown that the structure of DLC films was strongly depended on the pulse bias. The DLC films prepared with-5 kV pulse bias, which contains more C-H bonds, display lowest hardness value (83GPa). The DLC films deposited with-15 kV pulse bias contains the highest density of sp3bonds along with high hardness (236GPa). The friction coefficients of DLC films when sliding against GCr15 ball was about 017. The wear resistance of DLC films was increased owing to the TiNx interlayer between steel substrate and DLC films.
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