Abstract:Electron backscatter diffraction (EBSD) is a well-established method of characterisation for crystalline materials. This technique can rapidly acquire and index diffraction patterns to provide phase and orientation information about the crystals on the material surface. The conventional analysis method uses signal processing based on a Hough/Radon transform to index each diffraction pattern. This method is limited to the analysis of simple geometric features and ignores subtle characteristics of diffraction patterns, such as variations in relative band intensities. A second method, developed to address the shortcomings of the Hough/Radon transform, is based on template matching of a test experimental pattern with a large library of potential patterns. In the present work, the template matching approach has been refined with a new cross correlation function that allows for a smaller library and enables a dramatic speed up in pattern indexing. Refinement of the indexed orientation is performed with a follow-up step to allow for small alterations to the best match from the library search. The orientation is further refined with rapid measurement of misorientation using whole pattern matching. The refined template matching approach is shown to be comparable in accuracy, precision and sensitivity to the Hough based method, even exceeding it in some cases, via the use of simulations and experimental data collected from a silicon single crystal and a deformed {\alpha}-iron sample. The drastic speed up and pattern refinement approaches should increase the widespread utility of pattern matching approaches.

High-definition Electron Diffraction Patterns and Their Indexation Results of a Single Crystal Si Wafer

I-DIC EBSD Indexation Results

Improved EBSD indexation accuracy by considering energy distribution of diffraction patterns

Calibration of crystal orientation and pattern center of EBSD using integrated digital image correlation

Indexation of electron diffraction patterns at grain boundaries

Indexing Electron Backscatter Diffraction Patterns with a Refined Template Matching Approach

Accuracy assessment of crystal orientation indexations by EBSD

Residual-based pattern center calibration in high-resolution electron backscatter diffraction

Theoretical and experimental electron diffraction intensity maps for single crystal silicon from an ultrafast source

"Row Indexing" of Electron Diffraction Patterns along [Uv0]

Surface Patterning Allowing Combined EBSD and DIC Investigations During In-Situ Deformation Experiments

Estimation of Elastic Strain by Integrated Image Correlation on Electron Diffraction Patterns.

On the origin of the additional electron diffraction spots from epitaxial (111) Si single-crystal films

Indexing of multi-particle diffraction data in a high-pressure single-crystal diffraction experiment

Dataset of simulated vibrational density of states and X-ray diffraction profiles of mechanically deformed and disordered atomic structures in Gold, Iron, Magnesium, and Silicon

CSD 1935404: Experimental Crystal Structure Determination

An iterative method for reference pattern selection in high resolution electron backscatter diffraction (HR-EBSD)

CSD 1935403: Experimental Crystal Structure Determination

Investigation of Medium to High Strain Deformation Microstructures Using an Automated Electron Backscattering Pattern (EBSP) System

Pattern matching analysis of electron backscatter diffraction patterns for pattern centre, crystal orientation and absolute elastic strain determination - accuracy and precision assessment

Serial Rotation Electron Diffraction Raw Data