On the origin of the additional electron diffraction spots from epitaxial (111) Si single-crystal films

Y. Lereah,E. Grünbaum
DOI: https://doi.org/10.1080/01418618408244207
1984-07-01
Philosophical Magazine A
Abstract:The origin of additional electron diffraction spots from epitaxial (111) Si single crystal films grown on CaF2 has been investigated. They have been found to arise from small particles containing a high density of stacking faults. These particles can be treated as an h.c.p. phase related to the matrix with (0001) hexagonal ∥ (111) cubic and [1010] hexagonal ∥ [121] cubic.
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