Large-Scale Optical Phased Array Based on a Multi-Layer Silicon-Nitride-on-Silicon Photonic Platform

Liangjun Lu,Weihan Xu,Yuyao Guo,Chuxin Liu,Jianping Chen,Linjie Zhou
DOI: https://doi.org/10.1364/ofc.2024.m4b.1
2024-01-01
Abstract:We review our recent progress on a chip-scale LiDAR transmitter on a multi-layer Si3N4-on-Si photonic platform. Experimental results show the high optical power budget of the chip and the feasibility for FMCW ranging.
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