Abstract:Microelectronic integration is a key enabler for the ubiquitous deployment of devices in large volumes ranging from MEMS and imaging sensors to consumer electronics. Such integration has also been achieved in photonics, where compact optical transceivers for data centers employ co-integrated photonic and electronic components. Chip-scale integration is of particular interest to coherent laser ranging i.e. frequency modulated continuous wave (FMCW LiDAR), a perception technology that benefits from instantaneous velocity and distance detection, eye-safe operation, long-range and immunity to interference. Full wafer-scale integration of this technology has been compounded by the stringent requirements on the lasers, requiring high optical coherence, low chirp nonlinearity and requiring optical amplifiers. Here, we overcome this challenge and demonstrate a photonic-electronic integrated circuit-based coherent LiDAR engine, that combined all functionalities using fully foundry-compatible wafer scale manufacturing. It is comprised of a micro-electronic based high voltage arbitrary waveform generator, a hybrid photonic circuit based tunable Vernier laser with piezoelectric actuators, and an erbium-doped waveguide optical amplifier - all realized in a wafer scale manufacturing compatible process that comprises III-V semiconductors, SiN silicon nitride photonic integrated circuits as well as 130nm SiGe BiCMOS technology. The source is a turnkey, linearization-free, and can serve as a 'drop-in' solution in any FMCW LiDAR, that can be seamlessly integrated with an existing focal plane and optical phased array LiDAR approaches, constituting a missing step towards a fully chip-scale integrated LiDAR system.

Coaxial transceiving LiDAR based on a silicon photonic optical phased array

High-Speed and Low-Power Silicon Optical Phased Array Based on the Carrier-Depletion Mechanism

SiN-on-SOI Optical Phased Array LiDAR for Ultra-Wide Field of View and 4D Sensing

Two-dimensional Beam Steering Based on Dispersive Optical Phased Array

Beam-Steering Based on Dispersive Optical Phased Array for FMCW LiDAR Application

Development, calibration and characterization of silicon photonics based optical phased arrays

Phase-modulated continuous-wave coherent ranging method for optical phased array lidar.

A Fully Solid-State Beam Scanner for FMCW LiDAR Application

Two-dimensional Beam Scanner Based on Silicon Optical Phased Array with Half-Wavelength Period

Large steering range and low-loss integrated optical phased array with SiN-Si dual-layer non-uniform antenna

Silicon Optical Phased Array Based on Carrier-depletion Phase Shifters

Sub-wavelength-pitch silicon-photonic optical phased array for large field-of-regard coherent optical beam steering

Silicon Optical Phased Array with High-Efficiency Beam Formation over 180 Degree Field of View

FMCW LiDAR with a coherent receiver chip based on 3 μm SOI photonics platform

A Flexible on-chip phase calibration method for optical phased array

A Large-Range Steering Optical Phased Array Chip and High-Speed Controlling System

A Hybrid Solid-State Beam Scanner for LiDAR Applications

Photonic-electronic integrated circuit-based coherent LiDAR engine

Silicon Optical Phased Array with Calibration-Free Phase Shifters.

Integrated communication and sensing system based on Si-SiN dual-layer optical phased array

Multi-beam solid-state LiDAR using star-coupler-based optical phased arrays