One-Dimensional InP-Based Photonic Crystal Quantum Cascade Laser Emitting at 5.36Μm

Li Lu,Yang Shao,Junqi Liu,Fengqi Liu,Zhanguo Wang
2008-01-01
Abstract:An InP-based one-dimensional photonic crystal quantum cascade laser is realized. With photo lithography instead of electron beam lithography and using inductively coupled plasma etching, four-period air-semiconductor couples are defined as Bragg reflectors at one end of the resonator. The spectral measurement at 80K shows the quasi-continuous-wave operation with the wavelength of 5.36μm for a 22μm-wide and 2mm-long epilayer-up bonded device.
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