A SMALL-SIZE ARC-DISCHARGE ION-SOURCE

Ge Bai
1987-01-01
Abstract:The article describes a small-size are discharge ion source.Some of its basic parametersare measured by combining the arc discharge with the electron oscillation.The ion current is7 mA.It can produce multi-charge ions.The extraction structure is commonly used by thissource and the r.f.ion source.This ion source has been used in a 400 keV ion implanter inBeijing Normal University and it is stable in operation.
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