A Miniaturized 2.45 GHz ECR Ion Source at Peking University

Jia-Mei Wen,Shi-Xiang Peng,Hai-Tao Ren,Tao Zhang,Jing-Feng Zhang,Wen-Bin Wu,Jiang Sun,Zhi-Yu Guo,Jia-Er Chen
DOI: https://doi.org/10.1088/1674-1056/27/5/055204
2018-01-01
Chinese Physics B
Abstract:A miniaturized 2.45 GHz permanent magnet electron cyclotron resonance(PMECR) ion source, which has the ability of producing a tens-m A H+beam, has been built and tested at Peking University(PKU). Its plasma chamber dimension is Φ30 mm×40 mm and the whole size of the ion source is Φ180 mm×130 mm. This source has a unique structure with the whole source body embedded into the extraction system. It can be operated in both continuous wave(CW) mode and pulse mode. In the CW mode, more than 20 m A hydrogen ion beam at 40 k V can be obtained with the microwave power of 180 W and about 1 m A hydrogen ion beam is produced with a microwave power of 10 W. In the pulse mode, more than50 m A hydrogen ion beam with a duty factor of 10% can be extracted when the peak microwave power is 1800 W.
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