Abstract:Aluminum nitride (AlN) and Sc-doped AlN have become the most popular piezoelectric thin-film materials in the fields of RF and smart sensing. AlN/AlScN composite films based on 2-2 connectivity exhibit stronger interaction and better lattice matching between AlN and AlScN, resulting in improved nucleation, growth kinetics, crystal quality, piezoelectric response, and surface morphology. In this work, a method for predicting the effective coefficients of AlN/AlScN composite piezoelectric thin films is proposed and validated. This prediction method is based on first-principles calculations, the Reuss model theory, and the Mori-Tanaka (MT) method. It also conforms to the mean strain and stress theory of the micromechanical approach. The precise compliance, dielectric and piezoelectric properties ( Sij , ε , dij ) of AlN/Al 0.8 Sc 0.2 N composite film with different thickness ratios are calculated. Through the deflection measurement of piezoelectric cantilever with proof mass based on AlN/Al 0.8 Sc 0.2 N composite film, the experimental piezoelectric stress coefficient ( d31 ) is calculated. The correctness of the prediction method is verified by comparing the theoretical calculation ( d31* = −3.1 pC/N ) and experimental data ( d31 = −3.4 pC/N ), showing excellent agreement within experimental error. Meanwhile, the voltage sensitivity of the accelerometer is significantly enhanced by the AlN/AlScN composite piezoelectric film. It is believed that this work will broaden the theoretical study and application of the AlN/AlScN composite piezoelectric film.

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First-Principle Calculations of Elastic Properties of Wurtzite-Type Aluminum Nitride under Pressure

Acoustic Softening and Residual Hardening in Aluminum: Modeling and Experiments

Effects of Surface/interface Stress on Phonon Properties and Thermal Conductivity in AlN/GaN/AlN Heterostructural Nanofilms

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Simulating Stress-Tunable Phonon and Thermal Properties in Heterostructured AlN/GaN/AlN-nanofilms

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Theoretical investigation of the elastic, electronic, thermodynamic and optical properties of the zinc-blende structure AlN under high pressure

Evaluation of residual stress of c oriented AlN/Si (111) and its impact on mushroom-shaped piezoelectric resonator

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Structural evolution of the elastic properties in nano-structured AlN film

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Study on the uniaxial tensile mechanical behavior of two-dimensional single-crystal aluminum nitride

Elasticity, mechanical and thermal properties of submicron h-AlN: in-situ high pressure ultrasonic study

Experimental and theoretical studies of effective piezoelectric coefficients of 2-2 connectivity AlN/AlScN composite piezoelectric films

Preparation, Characterization, and Application of AlN/ScAlN Composite Thin Films

Elastic-plastic mechanical properties of AlxGa1-xN thin films with high Al composition

Growth-microstructure-thermal property relations in AlN thin films

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Effect of Stress on Thermal Properties of AlGaN Nanofilms

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