Abstract:Abstract Ultra-silicon-rich nitride with refractive indices ~ 3 possesses high nonlinear refractive index—100× higher than stoichiometric silicon nitride and presents absence of two-photon absorption, making it attractive to be used in nonlinear integrated optics at telecommunications wavelengths. Despite its excellent nonlinear properties, ultra-silicon-rich nitride photonics devices reported so far still have fairly low quality factors of $$\sim 6\times {10}^{4}$$ ∼ 6 × 10 4 , which could be mainly attributed by the material absorption bonds. Here, we report low temperature plasma-deposited dichlorosilane-based ultra-silicon-rich nitride (Si 8 N) with lower material absorption bonds, and ~ 2.5× higher quality factors compared to ultra-silicon-rich nitride conventionally prepared with silane-based chemistry. This material is found to be highly rich in silicon with refractive indices of ~ 3.12 at telecommunications wavelengths and atomic concentration ratio Si:N of ~ 8:1. The material morphology, surface roughness and binding energies are also investigated. Optically, the material absorption bonds are quantified and show an overall reduction. Ring resonators fabricated exhibit improved intrinsic quality factors $$\sim 1.5\times {10}^{5}$$ ∼ 1.5 × 10 5 , ~ 2.5× higher compared to conventional silane-based ultra-silicon-rich nitride films. This enhanced quality factor from plasma-deposited dichlorosilane-based ultra-silicon-rich nitride signifies better photonics device performance using these films. A pathway has been opened up for further improved device performance of ultra-silicon-rich nitride photonics devices at material level tailored by choice of different chemistries.

Nonlinear Optical Characterization of Deuterated Silicon-Rich Nitride Waveguides

Optical characterization of deuterated silicon-rich nitride waveguides

Linear And Nonlinear Characterization Of Silicon/Silicon-Rich Nitride Hybrid Waveguides

Characterization and Optimal Design of Silicon-Rich Nitride Nonlinear Waveguides for 2 Μm Wavelength Band

Silicon/silicon-rich Nitride Hybrid-Core Waveguide for Nonlinear Optics

Reference Wave Source Based on Silicon Nitride Waveguide in Point Diffraction Interferometer

Si3N4 Waveguide Platform for Label-Free Super-Resolution Imaging: Simulation and Analysis

Optical Properties of A Silicon-Rich Nitride Ridge Waveguide at $2\ \boldsymbol{\mu}\mathbf{m}$ Wavelengths

Enhanced photonics devices based on low temperature plasma-deposited dichlorosilane-based ultra-silicon-rich nitride (Si8N)

Mid-infrared Nonlinear Silicon Hybrid Waveguide with High Figure of Merit

Experimental Demonstration of an Apodized-Imaging Chip-Fiber Grating Coupler for Si_3N_4 Waveguides

Nonlinear-Optic Silicon-Nanowire Waveguides

High confinement, high yield Si3N4 waveguides for nonlinear optical application

Fabrication of Si/Si1-Xgex Waveguide Wdm Components

Germanium-On-Silicon Nitride Waveguides for Mid-Infrared Integrated Photonics

Deuterated silicon nitride photonic devices for broadband optical frequency comb generation

Dynamics of Nonlinear Optical Losses in Silicon‐Rich Nitride Nano‐Waveguides

Infrared Spectra of Silicon Nanowires

2Μm Mid-Infrared Silicon-Rich Silicon Nitride/silicon Hybrid Nonlinear Waveguides

A Comparison of Total-Ionizing-Dose Effects in Silicon and Silicon-Nitride Waveguides