Nanometer Measurement and Micro Intelligent Instrument

Zhuangde Jiang
2000-01-01
Abstract:Nanotechnology plays role as important as life science, information science and environment engineering in the 21st century. With the development of precise, super-precise machining, super-minuteness technology and the penetration to understanding of micro world, higher requirement for measurement technology with high reliability and precision impels the development of nanometer measurement. It has been an important constituent part of nanotechnology. As progresses of micro sensor, micro actuator, signal processing technigue and microelectronics, micro intelligent instrument has become a promising research field of MEMS. Micro intelligent instrument, believed to improve properties and decrease cost of instrument, will make our life and production more conveniently. With bright market future, micro instrument represents the instrument oriented to 21st century.
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