Research about functions, fabrications and applications of the microstructures in sensors

Songyu Liu
DOI: https://doi.org/10.54254/2755-2721/43/20230824
2024-02-26
Abstract:Microstructures in sensors are of immense importance in technology and scientific research. Microstructures play a vital role in achieving enhanced sensitivity, accuracy, and miniaturization in sensors. Understanding their importance is crucial for advancing sensor technology in healthcare, environmental monitoring, robotics, and other fields. To conduct this research, a systematic review of academic and industry sources is performed. Existing studies, experimental techniques, and real-world applications are analyzed. The paper covers diverse topics related to microstructures in sensors. It highlights the importance of microstructures, explores types such as Micro-electromechanical Systems (MEMS), and nanomaterials, and discusses their unique characteristics. Fabrication techniques like lithography, thin-film deposition, and additive manufacturing are examined. In addition, the advantages and limitations of each method are discussed, emphasizing manufacturing challenges and opportunities. Additionally, the paper explores applications of microstructures in biomedical sensing, environmental monitoring, consumer electronics, and industrial automation. Existing research and success stories showcase their potential to revolutionize various sectors.
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