Effects of heat treatment and heat cycle on transformation temperature and structure of Ni-49.12% Ti sputter-depositing film
PingShan Qiu,Dayong Li,Liwei Guo,WeiXin Huang,Guozhen Wang
2001-01-01
Abstract:The effects of heat treatment and heat cycle on the SMA thin film of Ni-49.12% Ti formed by hollow cathode deposit (HCD) sputter-deposition on glass substrates were studied. The results showed because the temperature on the substrate is sufficiently high in the process of sputter-depositing film, the thin film is partly crystallized and its organization is the same as the parent phase. A series of change in the film occurs after heat treatment. Within the definite limits, with increasing heat temperature and time, the higher the heat temperature is and the longer the holding time is, the better the crystallizing result will be, and the bigger the crystal size is, meanwhile the productions of R, M and Ni3Ti phase are accompanied, their transition points are increased. However, when heat temperature is extremely high and holding time is extremely long, the quantity of each phase is reduced and their diffraction intensity is decreased. The temperature of phase transition in thin film after heat cycle is changed. With increasing the number of heat cycle, As and Af increase, Ms decreases and tR keep unchangeable basically. And it is discovered that crystallization in the surface of thin film is not so full as that of its inside after heat treatment.