Experimental Research on the Vacuum Gauge Calibrator with Comparative Measurement

Zhongqing Wu
2005-01-01
Abstract:The comparative measurement method for vacuum gauge calibration is introduced.The construction,principle and process of the calibrator are described.The effects of six kinds of gas on the calibrated ionization gauge are explored and relative sensitivity is obtained.The necessity of the calibration on the vacuum gauge and instrument is proved by the research.
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