Experimental Study on SOI LIGBT with Field Plate Resistances at Anode Side

Jie Wei,Pengchen Zhu,Yuxi Wei,Kemeng Yang,Jie Li,Junnan Wang,Kaiwei Dai,Hua Song,Sen Zhang,Wentong Zhang,Bo Zhang,Xiaorong Luo
DOI: https://doi.org/10.1109/ISPSD57135.2023.10147585
2023-01-01
Abstract:A novel snapback-free SOI LIGBT with Field Plate Resistances (FPR) is proposed and experimentally investigated. The FPR consisting of multiple polysilicon resistances is located above the field oxide at the anode side, which is compatible with the planar poly gate design. The two sides of FPR are connected with the P+ anode and N+ anode, respectively. The FPR not only effectively increases the anode distributed resistance to eliminate the snapback effect in the on-state, but also provides an electron extraction path during the turnoff period to accelerate the turning off and decrease the turnoff loss ( <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$E_{\text{off}}$</tex> ). A 439V FPR SOI LIGBT is fabricated and decreases the <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$E_{\text{off}}$</tex> by 36% at the expense of 7% increasement in on-state voltage drop ( <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$V_{\text{on}}$</tex> ) compared with the conventional SOI LIGBT. The experimental results show that the proposed FPR SOI LIGBT could achieve a good tradeoff relationship between the <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$E_{\text{off}}$</tex> and <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$V_{\text{on}}$</tex> .
What problem does this paper attempt to address?