Abstract:Thin-film lithium niobate (TFLN) has been considered as one of the most important platforms for constructing high-performance photonic integrated devices such as electro-optic modulators, frequency combs, classical/quantum light sources, and large-scale photonic integrated circuits, benefiting from its excellent optical properties of TFLN. The fabrication quality of TFLN photonic integrated devices plays an important role in the performance and the integration scale of these devices. As one of the element photonic structures, the state-of-the-art TFLN microrings reach an intrinsic Q factor higher than 10^7 with ultra-smooth sidewalls, fabricated by photolithography assisted chemo-mechanical etching (PLACE). However, it is isolated on the chip surface and a tapered fiber is required to couple the light into and out of the resonator. Furthermore, it is difficult to maintain such high-Q factors when the microrings are monolithically integrated with bus waveguides by PLACE, resulted from large coupling loss with biggish coupling gap. Here, a relatively narrow gap of an ultra-high Q microring monolithically integrated with the bus-waveguide is achieved with 3.8 um by optimizing PLACE process, and a high temperature annealing is carried out to improve the loaded (intrinsic) Q factor with 4.29 X 10^6 (4.04 X 10^7), leading an ultra-low propagation loss of less than 1 dB/m, which is approximately 3 times better than the best values previously reported in ion-slicing TFLN platform.

Ultra-high Q Microring Resonators on Gallium-nitride-on-sapphire Platform

Fabrication of Microresonators of High Q/V Ratios Using Femtosecond Laser Micromachining

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Lithium niobate microring with ultra-high Q factor above 10^8

Ultra-high Q lithium niobate microring monolithically fabricated by photolithography assisted chemo-mechanical etching

Graphene-On-Silicon Nitride Microring Resonators with High Modulation Depth

Monolithic Ultrahigh-Q Lithium Niobate Microring Resonator

Ultrahigh-Q lithium niobate microring resonator with multimode waveguide.

Ultra-high-Q UV microring resonators based on single-crystalline AlN platform

Ultra-High-Quality Factor Micro-Ring Resonator Based on Silicon Nitride

Design and fabrication of high-Q silicon micro-resonators

Demonstration of Ultra-High-Q Silicon Microring Resonators for Nonlinear Integrated Photonics

Aluminum Nitride-on-sapphire Platform for Integrated High-Q Microresonators

Compact microring resonators integrated with grating couplers working at 2 μm wavelength on silicon-on-insulator platform.

Compact multimode silicon-nitride waveguide micro-ring resonator with high-Q

High performance fully etched isotropic microring resonators in thin-film lithium niobate on insulator platform

Single-Mode Silicon-On-Insulator Elliptical Microdisk Resonators with High Q Factors

High Q Resonators in the GaAs and AlGaAs on Insulator Platform

An Ultra-High-Q Lithium Niobate Microresonator Integrated with a Silicon Nitride Waveguide in the Vertical Configuration for Evanescent Light Coupling

Ultra-high-Q racetrack microring based on silicon-nitride

Demonstration of Green and UV Wavelength High Q Aluminum Nitride on Sapphire Microring Resonators Integrated with Microheaters