Abstract:Aluminum gallium arsenide (AlGaAs) and related III-V semiconductors have excellent optoelectronic properties. They also possess strong material nonlinearity as well as high refractive indices. In view of these properties, AlGaAs is a promising candidate for integrated photonics, including both linear and nonlinear devices, passive and active devices, and associated applications. Low propagation loss is essential for integrated photonics, particularly in nonlinear applications. However, achieving low-loss and high-confinement AlGaAs photonic integrated circuits poses a challenge. Here we show an effective reduction of surface-roughness-induced scattering loss in fully etched high-confinement AlGaAs-on-insulator nanowaveguides by using a heterogeneous wafer-bonding approach and optimizing fabrication techniques. We demonstrate ultrahigh-quality AlGaAs microring resonators and realize quality factors up to 3.52 × 106 and finesses as high as 1.4 × 104. We also show ultra-efficient frequency comb generations in those resonators and achieve record-low threshold powers on the order of ∼20 µW and ∼120 µW for the resonators with 1 THz and 90 GHz free-spectral ranges, respectively. Our result paves the way for the implementation of AlGaAs as a novel integrated material platform specifically for nonlinear photonics and opens a new window for chip-based efficiency-demanding practical applications.

Aluminum Nitride-on-sapphire Platform for Integrated High-Q Microresonators

Monolithic Integration of a Lithium Niobate Microresonator with a Free-Standing Waveguide Using Femtosecond Laser Assisted Ion Beam Writing.

Integrated High-Q Crystalline AlN Microresonators for Broadband Kerr and Raman Frequency Combs

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Monolithic Integration of a High-Quality Factor Lithium Niobate Microresonator with a Free-Standing Membrane Waveguide Using Femtosecond Laser Assisted Ion Beam Writing (FLAIBW)

Femtosecond Laser Direct Writing of High-Q Microresonators in Glass and Crystals

On-Chip Electro-Optic Tuning of A Lithium Niobate Microresonator with Integrated In-Plane Microelectrodes

High speed surface acoustic wave and laterally excited bulk wave resonator based on single-crystal non-polar AlN film

Microwave Photonic Devices Based on High-Q AlN Microring Resonators

Integrated high frequency aluminum nitride optomechanical resonators

Broadband frequency comb generation in aluminum nitride-on-sapphire microresonators

High Q micro-ring resonators fabricated from polycrystalline aluminum nitride films for near infrared and visible photonics

Integrated Continuous-Wave Aluminum Nitride Raman Laser

Ultra-high-Q UV microring resonators based on single-crystalline AlN platform

Demonstration of Green and UV Wavelength High Q Aluminum Nitride on Sapphire Microring Resonators Integrated with Microheaters

Aluminum nitride integration on silicon nitride photonic circuits: a new hybrid approach towards on-chip nonlinear optics

Ultrahigh-Q AlGaAs-on-insulator Microresonators for Integrated Nonlinear Photonics.

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Continuous-wave Raman Lasing in Aluminum Nitride Microresonators

High-Q Resonators on Single Crystal Aluminum Nitride Grown by Molecular Beam Epitaxy

17,000 %/W Second Harmonic Conversion Efficiency in Single Crystalline Aluminum Nitride Microresonators