A High Response Three-Dimensional Ag Nanoparticles/Rgo Microtubular Field Effect Transistor Sensor for No<inf>2</inf> Detections

Jingye Sun,Weijie Yin,Ying Zhang,Yang Zhang,Mingqiang Zhu,Hao Hong,Qiming Tian,Juntao Qi,Yutao Ba,Tao Deng
DOI: https://doi.org/10.1109/MEMS51782.2021.9375305
2021-01-01
Abstract:In this paper, a three-dimensional (3D) microtubular reduced graphene oxide (rGO) FET sensor, decorated with silver nanoparticles (Ag NPs) has been fabricated and demonstrated for NO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> detections. The performance of our planar 2D sensor and 3D microtubular sensors with different numbers of winding were compared and contrasted. The preliminary results shown that our 3D microtubular Ag NPs/rGO FET sensor with 2 windings exhibits a sensor response of 8.17 % to 10 part per million (ppm) NO <sub xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</sub> at room temperature. This 3D microtubular concept and study provide a new approach for highly integrated and miniaturized hazardous gases sensing applications for health and safety detections, environmental monitoring and beyond.
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