A High Response Three-Dimensional Ag Nanoparticles/Rgo Microtubular Field Effect Transistor Sensor For No2 Detections

Jingye Sun,Weijie Yin,Ying Zhang,Yang Zhang,Mingqiang Zhu,Hao Hong,Qiming Tian,Juntao Qi,Yutao Ba,Tao Deng
DOI: https://doi.org/10.1109/MEMS51782.2021.9375305
2021-01-01
Abstract:In this paper, a three-dimensional (3D) microtubular reduced graphene oxide (rGO) FET sensor, decorated with silver nanoparticles (Ag NPs) has been fabricated and demonstrated for NO2 detections. The performance of our planar 2D sensor and 3D microtubular sensors with different numbers of winding were compared and contrasted. The preliminary results shown that our 3D microtubular Ag NPs/rGO FET sensor with 2 windings exhibits a sensor response of 8.17 % to 10 part per million (ppm) NO2 at room temperature. This 3D microtubular concept and study provide a new approach for highly integrated and miniaturized hazardous gases sensing applications for health and safety detections, enviromnental monitoring and beyond.
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