High Responsivity and Fast Response 8×8 Β -Ga 2 O 3 Solar-Blind Ultraviolet Imaging Photodetector Array

GaoHui Shen,Zeng Liu,Kai Tang,ShuLin Sha,Lei Li,Chee-Keong Tan,YuFeng Guo,WeiHua Tang
DOI: https://doi.org/10.1007/s11431-022-2404-8
2023-01-01
Abstract:In this work, an 8×8 Ga2O3 solar-blind ultraviolet photodetector array is introduced for image sensing application. The 2-in wafer-scaled Ga2O3 thin film was grown by metalorganic chemical vapor deposition technique; and the photodetector array was fabricated through ultraviolet photolithography, lift-off, and electron-beam evaporation. In addition to the high solar-blind/visible rejection ratio of 104, every photodetector cell in the array has high performance and fast response speed, such as responsivity of 49.4 A W−1, specific detectivity of 6.8 × 1014 Jones, external quantum efficiency of 1.9 × 104
What problem does this paper attempt to address?