Abstract:Amorphous alumina films are isotropic and have no grain boundaries, which make them have smooth surfaces, excellent properties, and wide applications in protective coatings, catalysis, and microelectronics. However, high-quality alumina films were usually prepared by vapor-phase approaches which need expensive equipment and long production time. Additionally, amorphous films are long-range disordered, which makes the study of structure–property relationships challenging. Here, a simple sol–gel method is employed to obtain high-quality amorphous Al2O3 thin films. The microstructure, morphology, and mechanical properties of amorphous Al2O3 thin films were systematically investigated. All the Al2O3 thin films heat-treated at 600–800∘C are in amorphous state with ultrasmooth surface (Ra values about 0.29–0.43 nm) and high mechanical properties (elastic modulus ∼170[Formula: see text]GPa, hardness ∼20[Formula: see text]GPa). The mechanical properties (E and H) of Al2O3 films gradually increase with the increase of heat-treating temperature. Additionally, the Al coordination of the amorphous alumina films are analyzed by solid-state NMR and correlated with the mechanical properties. The results show that in amorphous alumina, the presence of tetrahedral Al ([4]Al) and octahedral Al ([6]Al) is helpful to improve the mechanical properties, while the five-coordinated Al ([5]Al) is not conducive to improve the mechanical properties. The results demonstrate that sol–gel method is an attractive alternative to time-consuming and expensive vapor-phase approaches and are useful for scale-up to applications and research of amorphous alumina films.

Study of the Synthesis of Α-Al_2o_3 Platelet Crystal by Anhydrous Potassium Alum with the Molten Salt Method

Preparation of alumina ceramic template by the molten salt method

Influence of starting materials on plate-like alumina synthesized by molten salt method

Synthesis of plate-like α-Al2O3 single-crystal particles in NaCl–KCl flux using Al(OH)3 powders as starting materials

Morphology-controlled Synthesis of Α-Alumina Microplatelets Through an Additive-Assisted Molten Salt Reaction

Novel temperature dependent process for α-Al2O3 platelets

Synthesis of thin alpha alumina platelets with a large aspect ratio

The Microstructure, Morphology, and Mechanical Properties of Sol-Gel-derived Amorphous Aluminum Oxide Films

Study of Preparation of Cobalt Aluminate by Sol-Gel Process and Electroless Plating

Effect of Synthesizing Temperature of Alumina Powder with Rose-Like Structure on the Microstructure and Mechanical Property of Alumina Ceramic

Hydrothermal Synthesis of Magnesium Aluminate Platelets

Synthesis of Ba0.6Sr0.4TiO3 Platelet Crystals Based on Bi4Ti3O12 Precursor by Topochemical Microcrystal Conversion

Molten Salt Synthesis of Magnesium Aluminate (mgal2o4) Spinel on Ti3alc2 Substrate

Preparation and Crystallization of Si-Al Gel

A Simple Molten Salt Method to Synthesize Single-Crystalline Potassium Titanate Nanobelts

Low-temperature synthesis of α-Al2O3 single crystal platelets by one-step thermal decomposition of Al-urea complex

Micro-structure studies of the molten binary K3AlF6–Al2O3 system by in situ high temperature Raman spectroscopy and theoretical simulation

Synthesis and properties of high aspect ratio SrBi 4 Ti 4 O 15 microplatelets

Study on Synthesis of CA6 and MgAl2O4 with Dolomite As a Source of Calcium and Magnesium

Aluminium induced sub-microsized α-Al2O3 platelets in the soda-lime-silica glass

Synthesis of Large Diameter Plat-Like Ca3co4o9 Particle by Molten Salt Method