Numerical Modeling of MEMS Resonators

Hamid T. Chorsi,Meysam T. Chorsi,Stephen D. Gedney

DOI: https://doi.org/10.48550/arXiv.1611.05310

2016-11-12

Mesoscale and Nanoscale Physics

Abstract:Microelectromechanical systems (MEMS) resonators serve as frequency selective components in applications ranging from biology to communications. In this paper, the dynamic behavior of an RF MEMS disk resonator is formulated using an analytical method.

What problem does this paper attempt to address?

An Analytical Temperature-Dependent Design Model for Contour-Mode MEMS Resonators and Oscillators Verified by Measurements

Johannes Stegner,Sebastian Gropp,Dmitry Podoskin,Uwe Stehr,Martin Hoffmann,Matthias A Hein

DOI: https://doi.org/10.3390/s18072159

2018-07-04

Abstract:The importance of micro-electromechanical systems (MEMS) for radio-frequency (RF) applications is rapidly growing. In RF mobile-communication systems, MEMS-based circuits enable a compact implementation, low power consumption and high RF performance, e.g., bulk-acoustic wave filters with low insertion loss and low noise or fast and reliable MEMS switches. However, the cross-hierarchical modelling of micro-electronic and micro-electromechanical constituents together in one multi-physical design process is still not as established as the design of integrated micro-electronic circuits, such as operational amplifiers. To close the gap between micro-electronics and micro-electromechanics, this paper presents an analytical approach towards the linear top-down design of MEMS resonators, based on their electrical specification, by the solution of the mechanical wave equation. In view of the central importance of thermal effects for the performance and stability of MEMS-based RF circuits, the temperature dependence was included in the model; the aim was to study the variations of the RF parameters of the resonators and to enable a temperature dependent MEMS oscillator simulation. The variations of the resonator parameters with respect to the ambient temperature were then verified by RF measurements in a vacuum chamber at temperatures between −35 ∘C and 85 ∘C. The systematic body of data revealed temperature coefficients of the resonant frequency between −26 ppm/K and −20 ppm/K, which are in good agreement with other data from the literature. Based on the MEMS resonator model derived, a MEMS oscillator was designed, simulated, and measured in a vacuum chamber yielding a measured temperature coefficient of the oscillation frequency of −26.3 ppm/K. The difference of the temperature coefficients of frequency of oscillator and resonator turned out to be mainly influenced by the limited Q-factor of the MEMS device. In both studies, the analytical model and the measurement showed very good agreement in terms of temperature dependence and the prediction of fabrication results of the resonators designed. This analytical modelling approach serves therefore as an important step towards the design and simulation of micro-electronics and micro-electromechanics in one uniform design process. Furthermore, temperature dependences of MEMS oscillators can now be studied by simulations instead of time-consuming and complex measurements.
A New Modeling Method of MEMS System's Noise

ZHANG Xia,ZHENG Xu-dong,ZHENG Yang-ming,LUO Si-jian,WANG Yue-lin,JIN Zhong-he

DOI: https://doi.org/10.3969/j.issn.1004-1699.2008.03.034

2008-01-01

Abstract:This paper proposed a behavioral level simulation and modeling method based on Simulink within Matlab.MEMS gyroscope simulation system is built,using motion equations and transfer functions,by picking-up mechanical parameters of micromachined gyroscope and main parameters in external circuits.Noise of gyroscope and circuits are added in the simulation platform.Then,noise performance of AD630 demodulation circuit is simulated and tested;the optimized application of this circuit is analyzed.
Design, Fabrication, and Dynamic Analysis of a MEMS Ring Resonator Supported by Twin Circular Curve Beams

Ahmad Rahbar Ranji,Gnanesh Nagesh,Fangyan Sun,Mohammed Jalal Ahamed

DOI: https://doi.org/10.3390/s24144499

2024-07-11

Abstract:In this paper, we present a compressive study on the design and development of a MEMS ring resonator and its dynamic behavior under electrostatic force when supported by twin circular curve beams. Finite element analysis (FEA)-based modeling techniques are used to simulate and refine the resonator geometry and transduction. In proper FEA or analytical modeling, the explicit description and accurate values of the effective mass and stiffness of the resonator structure are needed. Therefore, here we outlined an analytical model approach to calculate those values using the first principles of kinetic and potential energy analyses. The natural frequencies of the structure were then calculated using those parameters and compared with those that were simulated using the FEA tool ANSYS. Dynamic analysis was performed to calculate the pull-in voltage, shift of resonance frequency, and harmonic analyses of the ring to understand how the ring resonator is affected by the applied voltage. Additional analysis was performed for different orientations of silicon and assessing the frequency response and frequency shifts. The prototype was fabricated using the standard silicon-on-insulator (SOI)-based MEMS fabrication process and the experimental results for resonances showed good agreement with the developed model approach. The model approach presented in this paper can be used to provide valuable insights for the optimization of MEMS resonators for various operating conditions.
Microelectromechanical System Resonant Devices: A Guide for Design, Modeling and Testing

Carolina Viola,Davide Pavesi,Lichen Weng,Giorgio Gobat,Federico Maspero,Valentina Zega

DOI: https://doi.org/10.3390/mi15121461

IF: 3.4

2024-12-01

Micromachines

Abstract:Microelectromechanical systems (MEMSs) are attracting increasing interest from the scientific community for the large variety of possible applications and for the continuous request from the market to improve performances, while keeping small dimensions and reduced costs. To be able to simulate a priori and in real time the dynamic response of resonant devices is then crucial to guide the mechanical design and to support the MEMSs industry. In this work, we propose a simplified modeling procedure able to reproduce the nonlinear dynamics of MEMS resonant devices of arbitrary geometry. We validate it through the fabrication and testing of a cantilever beam resonator functioning in the nonlinear regime and we employ it to design a ring resonator working in the linear regime. Despite the uncertainties of a fabrication process available in the university facility, we demonstrate the predictability of the model and the effectiveness of the proposed design procedure. The satisfactory agreement between numerical predictions and experimental data proves indeed the proposed a priori design tool based on reduced-order numerical models and opens the way to its practical applications in the MEMS industry.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Investigation of a Complete Squeeze-Film Damping Model for MEMS Devices

Qianbo Lu,Weidong Fang,Chen Wang,Jian Bai,Yuan Yao,Jiaxiao Chen,Xiang Xu,Wei Huang

DOI: https://doi.org/10.1038/s41378-021-00279-6

2021-01-01

Microsystems & Nanoengineering

Abstract:Dynamic performance has long been critical for micro-electro-mechanical system (MEMS) devices and is significantly affected by damping. Different structural vibration conditions lead to different damping effects, including border and amplitude effects, which represent the effect of gas flowing around a complicated boundary of a moving plate and the effect of a large vibration amplitude, respectively. Conventional models still lack a complete understanding of damping and cannot offer a reasonably good estimate of the damping coefficient for a case with both effects. Expensive efforts have been undertaken to consider these two effects, yet a complete model has remained elusive. This paper investigates the dynamic performance of vibrated structures via theoretical and numerical methods simultaneously, establishing a complete model in consideration of both effects in which the analytical expression is given, and demonstrates a deviation of at least threefold lower than current studies by simulation and experimental results. This complete model is proven to successfully characterize the squeeze-film damping and dynamic performance of oscillators under comprehensive conditions. Moreover, a series of simulation models with different dimensions and vibration statuses are introduced to obtain a quick-calculating factor of the damping coefficient, thus offering a previously unattainable damping design guide for MEMS devices.
Design and Fabrication of Micromachined Resonators

Ritesh Ray Chaudhuri,Joydeep Basu,Tarun Kanti Bhattacharyya

DOI: https://doi.org/10.48550/arXiv.1202.3048

2012-02-14

Other Computer Science

Abstract:Microelectromechanical system (MEMS) based on-chip resonators offer great potential for sensing and high frequency signal processing applications due to their exceptional features like small size, large frequency-quality factor product, integrability with CMOS ICs, low power consumption etc. This work is mainly aimed at the design, modeling, simulation, and fabrication of micromachined polysilicon disk resonators exhibiting radial-contour mode vibrations. A few other bulk mode modified resonator geometries are also being explored. The resonator structures have been designed and simulated in CoventorWare finite-element platform and fabricated by the PolyMUMPs surface micromachining process.
Concepts and Key Technologies of Microelectromechanical Systems Resonators

Tianren Feng,Quan Yuan,Duli Yu,Bo Wu,Hui Wang

DOI: https://doi.org/10.3390/mi13122195

IF: 3.4

2022-12-12

Micromachines

Abstract:In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality factor, frequency accuracy, and temperature stability of MEMS resonators, are summarized. Finally, the development status, existing challenges and future trend of MEMS resonators are summarized. As a typical research field of vibration engineering, MEMS resonators have shown great potential to replace quartz resonators in timing, frequency, and resonant sensor applications. However, because of the limitations of practical applications, there are still many aspects of the MEMS resonators that could be improved. This paper aims to provide scientific and technical support for the improvement of MEMS resonators in timing, frequency, and resonant sensor applications.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Static and Dynamic Mechanical Behaviors of Electrostatic MEMS Resonator with Surface Processing Error

Jingjing Feng,Cheng Liu,Wei Zhang,Shuying Hao

DOI: https://doi.org/10.3390/mi9010034

IF: 3.4

2018-01-17

Micromachines

Abstract:The micro-electro-mechanical system (MEMS) resonator developed based on surface processing technology usually changes the section shape either due to excessive etching or insufficient etching. In this paper, a section parameter is proposed to describe the microbeam changes in the upper and lower sections. The effect of section change on the mechanical properties is studied analytically and verified through numerical and finite element solutions. A doubly-clamped microbeam-based resonator, which is actuated by an electrode on one side, is investigated. The higher-order model is derived without neglecting the effects of neutral plane stretching and electrostatic nonlinearity. Further, the Galerkin method and Newton⁻Cotes method are used to reduce the complexity and order of the derived model. First of all, the influence of microbeam shape and gap variation on the static pull-in are studied. Then, the dynamic analysis of the system is investigated. The method of multiple scales (MMS) is applied to determine the response of the system for small amplitude vibrations. The relationship between the microbeam shape and the frequency response is discussed. Results show that the change of section and gap distance can make the vibration soften, harden, and so on. Furthermore, when the amplitude of vibration is large, the frequency response softening effect is weakened by the MMS. If the nonlinearity shows hardening-type behavior at the beginning, with the increase of the amplitude, the frequency response will shift from hardening to softening behavior. The large amplitude in-well motions are studied to investigate the transitions between hardening and softening behaviors. Finally, the finite element analysis using COMSOL software (COMSOL Inc., Stockholm, Sweden) is carried out to verify the theoretical results, and the two results are very close to each other in the stable region.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Temperature Coefficient of Frequency Modeling for Cmos-Mems Bulk Mode Composite Resonators

Siping Wang,Wen-Chien Chen,Bichoy Bahr,Weileun Fang,Sheng-Shian Li,Dana Weinstein

DOI: https://doi.org/10.1109/tuffc.2014.006724

IF: 3.267

2015-01-01

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control

Abstract:CMOS-MEMS resonators, which are promising building blocks for achieving monolithic integration of MEMS structure, can be used for timing and filtering applications, and control circuitry. SiO2 has been used to make MEMS resonators with quality factor Q > 10(4), but temperature instability remains a major challenge. In this paper, a design that uses an embedded metal block for temperature compensation is proposed and shows sub-ppm temperature stability (-0.21 ppm/K). A comprehensive analytical model is derived and applied to analyze and optimize the temperature coefficient of frequency (TCF) of the CMOS-MEMS composite material resonator. Comparison with finite element method simulation demonstrates good accuracy. The model can also be applied to predict and analyze the TCF of MEMS resonators with arbitrary mode shape, and its integration with simulation packages enables interactive and efficient design process.
Analysis of the quality factor of micromechanical resonators using memory-dependent derivative under different models

Ravi Kumar

DOI: https://doi.org/10.1007/s00419-021-01920-6

2021-03-11

Archive of Applied Mechanics

Abstract:In the present work, the quality factor (and thermoelastic damping) of a microbeam resonator is analyzed by employing the three-phase-lag thermoelasticity theory with memory-dependent derivative. We compare our results with different heat conduction models. An explicit formula of thermoelastic damping has been derived, and effects of the normalized frequency and the beam height on thermoelastic damping of the microbeam resonator have been studied. We presented our work numerically by taking Silicon. The effects of normalized frequency, beam height, and different kernel of memory-dependent derivative on thermoelastic damping has been presented with the numerical data of Silicon.

mechanics
Theoretical modeling and experimental investigation of in-phase resonant MEMS mirrors with cascaded structures

Wenhao CHEN,Huahuang LUO,Hadi Tavakkoli,Mingzheng DUAN,Wibool Piyawattanametha,Yi-Kuen Lee

DOI: https://doi.org/10.1088/1361-6439/ad3763

2024-03-27

Journal of Micromechanics and Microengineering

Abstract:This paper proposes an efficient nonlinear one-dimensional(1D) compact mass-damper-spring model to predict the dynamic response of electrostatic resonant MEMS mirrors with cascaded structure The time-dependent damping moment due to viscous shear and pressure drag is computed using semi-empirical analytical equations for comb-drive structures and device frames. Nonlinear electrostatic force induced by the comb drives is efficiently acquired based on the hybrid method. The optimized device is fabricated using MEMS fabrication processes using a 4-inch SOI wafer. The proposed compact model with the measured key parameters from the fabricated device shows excellent capability to accurately predict nonlinear dynamic responses of the fabricated device, including parametric excitation and hysteretic frequency response, with an average error of less than 5%. In particular, our 1D model is three orders of magnitude faster than the conventional finite element method (FEM) model (0.8s versus 1h), enabling efficient system-level optimization of the critical design parameters. Based on the parametric study, electrode gap distance and torsion spring width are found to be two critical design parameters and dimensional analysis is conducted for design optimization with scan angle enhancing from 16.8° to 24° compared with the first design.

engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Intermolecular Interactions in Radial-Contour Mode Microring Resonators

Meysam T. Chorsi

DOI: https://doi.org/10.48550/arXiv.1705.07710

2017-05-14

Classical Physics

Abstract:This research is on the dynamics of electrostatically actuated radial-contour mode microring resonators. The governing equation of motion is derived by the minimization of the Hamiltonian and generalized to include the viscous damping effect. The Galerkin method is used to discretize the distributed-parameter model of the considered ring resonator. The influences of intermolecular forces such as van der Waals and Casimir on the dynamic behavior of the resonator are investigated. The natural frequencies and mode shapes of the ring are calculated for various values of ratio of radii (\b{eta}). The effect of the design parameters including ring radius, electrostatic voltage and quality factor on the dynamic responses, is discussed. The results of present study can be used in the design of novel MEMS resonators, RF filters and channelizers.
Modal Analysis of Practical Quartz Resonators Using Finite Element Method

Liu Yang,Nikolay Vitchev,Zhiping Yu

DOI: https://doi.org/10.1109/tuffc.2010.1409

2010-01-01

Abstract:Finite element simulation has been employed as a promising method in the analysis of piezoelectric active devices. It is desirable to obtain results consistent with experiments for real devices. In this paper, precise geometry models of quartz resonators were generated from direct measurements of practical devices and meshed. Realistic quartz blanks, electrodes, and mountings were included in the models. An application- specified 3-D finite element simulator was developed to perform the modal analysis of realistic crystal resonators. Using the model and simulator, real devices were simulated. Simulation results, including modal analysis and temperature properties, were shown in consistency with experimental measurements. The dependencies of device performance on practical factors were studied.
Electrostatic-Fluid-Structure 3D Numerical Simulation of a MEMS Electrostatic Comb Resonator

Zhanqing Yu,Shiping Chen,Ya Mou,Fade Hu

DOI: https://doi.org/10.3390/s22031056

2022-01-29

Abstract:The reliability and stability of MEMS electrostatic comb resonators have become bottlenecks in practical applications. However, there are few studies that comprehensively consider the nonlinear dynamic behavior characteristics of MEMS systems and devices in a coupled field so that the related simulation accuracy is low and cannot meet the needs of design applications. In this paper, to avoid the computational complexity and the uncertainty of the results of three-field direct coupling and take into the damping nonlinearity caused by coupled fields, a novel electrostatic-fluid-structure three-field indirect coupling method is proposed. Taking an actual microcomb resonant electric field sensor as an example, an electrostatic-fluid-structure multiphysics coupling 3D finite element simulation model is established. After considering the influence of nonlinear damping concerning the large displacement of the structure and the microscale effect, multifield coupling dynamics research is carried out using COMSOL software. The multiorder eigenmodes, resonant frequency, vibration amplitude, and the distribution of fluid load of the microresonator are calculated and analyzed. The simulated data of resonance frequency and displacement amplitude are compared with the measured data. The results show that the fluid load distribution of the microelectrostatic comb resonator along the thickness direction is high in the middle and low on both sides. The viscous damping of the sensor under atmospheric pressure is mainly composed of the incompressible flow damping of the comb teeth, which is an order of magnitude larger than those of other parts. Compared with the measured data, it can be concluded that the amplitude and resonance frequency of the microresonator considering the nonlinear damping force and residual thermal stress are close to the experimental values (amplitude error: 15.47%, resonance frequency error: 12.48%). This article provides a reference for studies on the dynamic characteristics of electrostatically driven MEMS devices.
Simulation methods for micro-electro-mechanical structures (MEMS) with application to a microtweezer

F. Shi,P. Ramesh,S. Mukherjee

DOI: https://doi.org/10.1016/0045-7949(95)00007-4

1995-09-01

Abstract:In this paper, we consider the simulation of microelectromechanical structures (MEMS). The objective of this work is to develop reliable numerical procedures that will help improve our understanding of MEMS behaviors, and enable optimal design of MEMS. A hybrid FEM-BEM method is developed to solve the coupled electrostatics and mechanics equations. Sensitivity analysis is carried out using the direct differentiation approach (DDA) to compute the design sensitivity coefficients (DSCs). The DSCs can then be used to drive optimization procedures. The numerical approaches are validated on a simple MEMS device—the tungsten microtweezer. The nonlinearity of the electrostatic force is found to dominate the behavior of this device. Sensitivity analysis and optimization procedures are used to compute critical parameters related to the nonlinear behaviors, as well as to solve inverse problems. The nonlinear behaviors of the tweezer are explained using a simple physical analog which is found to exhibit many of the same behaviors. Quantitative comparisons of the simulated results with experiments are also presented.

computer science, interdisciplinary applications,engineering, civil
Microelectromechanical Resonators for Radio Frequency Communication Applications

Joydeep Basu,Tarun Kanti Bhattacharyya

DOI: https://doi.org/10.48550/arXiv.1301.2780

2013-01-13

Other Computer Science

Abstract:Over the past few years, microelectromechanical system (MEMS) based on-chip resonators have shown significant potential for sensing and high frequency signal processing applications. This is due to their excellent features like small size, large frequency-quality factor product, low power consumption, low cost batch fabrication, and integrability with CMOS IC technology. Radio frequency communication circuits like reference oscillators, filters, and mixers based on such MEMS resonators can be utilized for meeting the increasing count of RF components likely to be demanded by the next generation multi-band/multi-mode wireless devices. MEMS resonators can provide a feasible alternative to the present day well established quartz crystal technology that is riddled with major drawbacks like relatively large size, high cost, and low compatibility with IC chips. This article presents a survey of the developments in this field of resonant MEMS structures with detailed enumeration on the various micromechanical resonator types, modes of vibration, equivalent mechanical and electrical models, materials and technologies used for fabrication, and the application of the resonators for implementing oscillators and filters. These are followed by a discussion on the challenges for RF MEMS technology in comparison to quartz crystal technology; like high precision, stability, reliability, need for hermetic packaging etc. which remain to be addressed for enabling the inclusion of micromechanical resonators into tomorrow's highly integrated communication systems.
A Novel High-Speed and High-Accuracy Mathematical Modeling Method of Complex MEMS Resonator Structures Based on the Multilayer Perceptron Neural Network

Qingsong Li,Kuo Lu,Kai Wu,Hao Zhang,Xiaopeng Sun,Xuezhong Wu,Dingbang Xiao

DOI: https://doi.org/10.3390/mi12111313

IF: 3.4

2021-10-26

Micromachines

Abstract:MEMS resonators have become core devices in a large number of fields; however, due to their complex structures, the finite element analysis (FEA) method is still the main method for their theoretical analysis. The traditional finite element analysis method faces the disadvantages of large calculation amount and long simulation time, which limits the development of high-performance MEMS resonators. This paper demonstrates a high-speed and high-accuracy simulation tool based on the artificial neural network, where a multilayer perceptron (MLP) neural network model is constructed. The typical structural parameters of MEMS resonator are used as the input layer, and its performance indicators produced by the finite element analysis method are the output layer. After iteratively trained with 4000 samples, the cumulative error of the neural network decreases to 0.0017 and a prediction network model is obtained. Compared with the finite element analysis results, the structural accuracy error predicted by the neural network model can be controlled within 6%, but its runtime is shortened by 15,000 times. This high-speed and high-accuracy mathematical modeling method can effectively improve the analyzing efficiency and provide a promising tool for the design and optimization of different complex MEMS resonators, which exhibit remarkable accuracy and speed.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
A Study of Advanced Modeling Methodology of CMOS-compatible RF-MEMS Devices for Integrated Circuit Design

Wenzheng Wu,Mengjun Jia,Xinxin Li,Yilong Hao,Xing Zhang,Yuhua Cheng

DOI: https://doi.org/10.1109/icsict.2008.4734577

2008-01-01

Abstract:With the rapid development of CMOS-compatible MEMS technology, it has been used to improve the performance of monolithic integrated RF circuits. To take advantages of the MEMS devices in RF circuits, accurate models are needed, with the considerations of important effects that impact the electrical behavior of the devices. In this paper, we explore the modeling methodology for CMOS-compatible MEMS inductors, which are fabricated with two different process approaches. Based on device simulation results for mechanical and electrical behavior, we propose a SPICE-like model for CMOS-compatible RF-MEMS inductors used for integrated circuit design.
The Recent Progress of MEMS/NEMS Resonators

Lei Wei,Xuebao Kuai,Yidi Bao,Jiangtao Wei,Liangliang Yang,Peishuai Song,Mingliang Zhang,Fuhua Yang,Xiaodong Wang

DOI: https://doi.org/10.3390/mi12060724

IF: 3.4

2021-06-19

Micromachines

Abstract:MEMS/NEMS resonators are widely studied in biological detection, physical sensing, and quantum coupling. This paper reviews the latest research progress of MEMS/NEMS resonators with different structures. The resonance performance, new test method, and manufacturing process of single or double-clamped resonators, and their applications in mass sensing, micromechanical thermal analysis, quantum detection, and oscillators are introduced in detail. The material properties, resonance mode, and application in different fields such as gyroscope of the hemispherical structure, microdisk structure, drum resonator are reviewed. Furthermore, the working principles and sensing methods of the surface acoustic wave and bulk acoustic wave resonators and their new applications such as humidity sensing and fast spin control are discussed. The structure and resonance performance of tuning forks are summarized. This article aims to classify resonators according to different structures and summarize the working principles, resonance performance, and applications.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
A New Methodology for RF MEMS Simulation

Peyrou David,Coccetti Fabio,Achkar Hikmat,Pennec Fabienne,Pons Patrick,Plana Robert

DOI: https://doi.org/10.5772/5970

2008-06-01

Abstract:A New Methodology for RF MEMS Simulation | InTechOpen, Published on: 2008-06-01. Authors: Peyrou David, Coccetti Fabio, Achkar Hikmat, et

Numerical Modeling of MEMS Resonators

An Analytical Temperature-Dependent Design Model for Contour-Mode MEMS Resonators and Oscillators Verified by Measurements

A New Modeling Method of MEMS System's Noise

Design, Fabrication, and Dynamic Analysis of a MEMS Ring Resonator Supported by Twin Circular Curve Beams

Microelectromechanical System Resonant Devices: A Guide for Design, Modeling and Testing

Investigation of a Complete Squeeze-Film Damping Model for MEMS Devices

Design and Fabrication of Micromachined Resonators

Concepts and Key Technologies of Microelectromechanical Systems Resonators

Static and Dynamic Mechanical Behaviors of Electrostatic MEMS Resonator with Surface Processing Error

Temperature Coefficient of Frequency Modeling for Cmos-Mems Bulk Mode Composite Resonators

Analysis of the quality factor of micromechanical resonators using memory-dependent derivative under different models

Theoretical modeling and experimental investigation of in-phase resonant MEMS mirrors with cascaded structures

Intermolecular Interactions in Radial-Contour Mode Microring Resonators

Modal Analysis of Practical Quartz Resonators Using Finite Element Method

Electrostatic-Fluid-Structure 3D Numerical Simulation of a MEMS Electrostatic Comb Resonator

Simulation methods for micro-electro-mechanical structures (MEMS) with application to a microtweezer

Microelectromechanical Resonators for Radio Frequency Communication Applications

A Novel High-Speed and High-Accuracy Mathematical Modeling Method of Complex MEMS Resonator Structures Based on the Multilayer Perceptron Neural Network

A Study of Advanced Modeling Methodology of CMOS-compatible RF-MEMS Devices for Integrated Circuit Design

The Recent Progress of MEMS/NEMS Resonators

A New Methodology for RF MEMS Simulation