Theoretical modeling and experimental investigation of in-phase resonant MEMS mirrors with cascaded structures

Wenhao CHEN,Huahuang LUO,Hadi Tavakkoli,Mingzheng DUAN,Wibool Piyawattanametha,Yi-Kuen Lee

DOI: https://doi.org/10.1088/1361-6439/ad3763

2024-03-27

Journal of Micromechanics and Microengineering

Abstract:This paper proposes an efficient nonlinear one-dimensional(1D) compact mass-damper-spring model to predict the dynamic response of electrostatic resonant MEMS mirrors with cascaded structure The time-dependent damping moment due to viscous shear and pressure drag is computed using semi-empirical analytical equations for comb-drive structures and device frames. Nonlinear electrostatic force induced by the comb drives is efficiently acquired based on the hybrid method. The optimized device is fabricated using MEMS fabrication processes using a 4-inch SOI wafer. The proposed compact model with the measured key parameters from the fabricated device shows excellent capability to accurately predict nonlinear dynamic responses of the fabricated device, including parametric excitation and hysteretic frequency response, with an average error of less than 5%. In particular, our 1D model is three orders of magnitude faster than the conventional finite element method (FEM) model (0.8s versus 1h), enabling efficient system-level optimization of the critical design parameters. Based on the parametric study, electrode gap distance and torsion spring width are found to be two critical design parameters and dimensional analysis is conducted for design optimization with scan angle enhancing from 16.8° to 24° compared with the first design.

engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied