Abstract:Sensors and actuators based on resonant micro-electro-mechanical systems (MEMS), such as scanning micro mirrors, are well-established in automotive and consumer products. As the areas of application broaden, the requirements for the MEMS are increasing. Devices outside of the performance specifications have to be rejected which is costly due to the high processing times of MEMS technologies. In particular, nonlinear system behavior is often found to cause unexpected device failure or performance issues. Thus, accurate simulation or rather system models which account for nonlinear sensor dynamics can not only increase process yield, but more importantly, lead to a comprehensive understanding of the underlying physics and to improved MEMS design. We have studied [1] the possibility of a rather drastic device failure induced by nonlinearities on the example of a resonant scanning MEMS micro mirror. On the level of a few selected chips, we have carefully measured the complex nonlinear system behavior and modeled it by a nonlinear mode-coupling phenomenon known as spontaneous parametric down-conversion (SPDC). The most intriguing feature of SPDC is the sudden change from a rather linear to a nonlinear system behavior at the critical oscillation amplitude. However, the threshold only lies within the range of the mirror's operational amplitude, if certain frequency resonance conditions regarding the mechanical modes are met. Thus, the critical amplitude strongly depends on the frequency spectrum of the MEMS design which in turn is largely influenced by fabrication imperfections. We validate the dependence of the critical amplitude on the resonance condition by measuring it for over 600 micro mirrors on wafer-level. Our work does not only validate the theory of SPDC with measurements on such a large scale, but also demonstrates modeling strategies which are essential for MEMS product design.

Amplitude- and Gas Pressure-Dependent Nonlinear Damping of High-Q Oscillatory MEMS Micro Mirrors

Investigation of a Complete Squeeze-Film Damping Model for MEMS Devices

Air Damping Characteristics of a 2D MEMS Electromagnetically Driven Micro-Mirror

Theoretical modeling and experimental investigation of in-phase resonant MEMS mirrors with cascaded structures

Validating the Critical Point of Spontaneous Parametric Down-Conversion for over 600 Scanning MEMS Micro Mirrors on Wafer-Level

Investigation of nonlinear squeeze-film damping involving rarefied gas effect in micro-electro-mechanical-systems

Dynamic Response Analysis of an Immersed Electrothermally Actuated MEMS Mirror

Computational Model for the Nonlinear Dynamic Response of MEMS-based Micromirror

Electromagnetically Driven MEMS Micromirror with Torsion Beam Structure

Surface Micromachined MEMS Deformable Mirror Based on Hexagonal Parallel-Plate Electrostatic Actuator

Oscillation Behavior of Two Mems Structures

Modelling and Experimental Verification of Step Response Overshoot Removal in Electrothermally-Actuated MEMS Mirrors

Simulation and Characterization of a Novel Large Stroke Micromirror

Spontaneous parametric down-conversion induced by non-degenerate three-wave mixing in a scanning MEMS micro mirror

Nonlinear damping in a micromechanical oscillator

Distributed Microscopic Actuation Analysis of Deformable Plate Membrane Mirrors

Optomechanical damping of a nanomembrane inside an optical ring cavity

A study of dynamic characteristics and simulation of MEMS torsional micromirrors

Response Analysis of a 2D MEMS Electromagnetically Driven Micro-Mirror

Static and Dynamic Mechanical Behaviors of Electrostatic MEMS Resonator with Surface Processing Error

Experimental Investigation of Vibration Isolator for Large Aperture Electromagnetic MEMS Micromirror