Design and Fabrication of Non-Resonant PZT MEMS Micromirror with Buried Piezoresistors for Closed Loop Position Control

Andrea Vergara,Takashiro Tsukamoto,Weileun Fang,Shuji Tanaka

DOI: https://doi.org/10.1088/1361-6439/aca101

2023-01-01

Journal of Micromechanics and Microengineering

Abstract:Abstract This paper reports on a 1D PZT micromirror integrated with buried piezoresistors for quasi-static feedback position control. The piezoresistors located along or below the PZT actuators could achieve the sensitivity as high as 3.1 mV/°, which was two orders of magnitude higher than the traditional ones located at the torsion springs (8.2 μV/°). This increased the signal-to-noise ratio by 2 orders of magnitude, which could enable the accurate position control. The response of the longitudinal sensors along the beams had a fast settling time less than 1 ms. The average position error was 0.975%, which was much better than that from the conventional shear stress sensor on the torsion bar of 3.1%.