Abstract:This study presents the design, implementation, and characterization of 1D resonant type micro-electro-mechanical-systems piezoelectric scanning mirrors with different actuator designs to investigate their influences on the figure of merits (FoM) for automotive LiDAR application. The MEMS scanning mirrors are driven by PZT thin film in this study owing to its outstanding piezoelectric properties. Three different beam-type piezoelectric actuators are designed, including the reference meander straight-beam actuator design, and the proposed meander curved-beam and straight-curved tapered beam actuator designs. Simulations show the scan angle enhancement for two proposed designs, yet the resonant scanning frequency of meander curved-beam design dropped to below the 2 kHz requirement. To evaluate the designs, scanning mirrors with two proposed actuators are fabricated and tested. Measurements show that the resonant frequencies for the two proposed MEMS scanning mirrors are 1735 Hz and 2578 Hz, respectively. Two proposed designs respectively have the maximum optical angles of 48.1° and 50.6° at the 20 Vpp driving voltage. Due to the much higher stress on the beam structure induced by the misalignment of PZT film, the actuator could not reach the predicted scanning angle of near 80°. In comparison of the two proposed designs, the straight-curved tapered beam actuator design could enhance the FoM for about 56%. In summary, the performances of piezoelectric MEMS scanning mirror can be improved by varying the designs of length and shape of actuator, and the distribution of PZT film on the suspended actuator is also a critical design concern.

A Silicon-based Scanning Micromirror Actuated by Piezoelectric Cantilevers Using PZT

Study of A Deformable Micro-Mirror Based on Pzt Films

Research on PZT-based Deformable Micro-mirror Array in Adaptive Optics

Novel Piezoelectric Actuation Mechanism for a Gimbal-Less Mirror in 2D Raster Scanning Applications

Design And Optimization Of Micro Scanner Driven By Folded Piezoelectric Unimorph Actuators Using Pzt Films

On the Design of Piezoelectric actuator for 1D MEMS scanning mirror applications

On the design of piezoelectric MEMS scanning mirror for large reflection area and wide scan angle

Feedback Controlled Pzt Micromirror with Integrated Buried Piezoresistors

Wide Angle and High Frequency Resonant Piezoelectric MEMS Mirror for Laser Beam Scanning Application

Design of Butterfly Plate Piezoelectric Actuator with Dual Driving Electrodes for MEMS Micro-Mirror

Deflection Model and Optimization of Piezoelectric Multilayer Cantilever Based on Silicon

Dual-Axis Piezoelectric Mems Micromirror with Adjustable Aspect Ratio of Lissajous Patterns Through Structure Design and Electrode Arrangement

A Novel Piezoelectrically Actuated 2-Dof Compliant Micro/Nano-Positioning Stage with Multi-Level Amplification

A Resonant Piezoelectric MEMS Mirror with 180-Degree Optical Scan Angle Under Atmosphere Pressure

Photothermal Microactuator Manufactured by Excimer Laser

Mirrorless MEMS imaging: a nonlinear vibrational approach utilizing aerosol-jetted PZT-actuated fiber MEMS scanner for microscale illumination

Design and Fabrication of Non-Resonant PZT MEMS Micromirror with Buried Piezoresistors for Closed Loop Position Control

Design of bi-axial piezoelectric MEMS micro mirror with gimbal actuator for dynamic decoupling

Novel Bow-Shape Transmission Springs for Piezoelectric MEMS Mirror with 180-Degrees Optical Scanning Angle

MEMS Scanning Mirror with Vertical Comb Actuator Based on Latching Technique

Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles