Deflection Model and Optimization of Piezoelectric Multilayer Cantilever Based on Silicon

Hua-jun FANG,Li-tian LIU,Tian-ling REN
DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.05.005
2006-01-01
Abstract:A concise deflection model for piezoelectric cantilever microactuators is derived using the radius of curvature of piezoelectric multilayer cantilevers. Based on the model, the piezoelectric cantilever microactuators using PZT film on silicon are simulated and analyzed. The relations between structural parameters of the films and deflection displacement of microactuators are obtained in the analysis. Furthermore, in terms of the analytical results, the piezoelectric cantilever microactuators are designed and optimized, and the optimal methods are put forward.
What problem does this paper attempt to address?