Modeling and design optimization of large-deflection piezoelectric folded cantilever microactuators.

Huajun Fang,Litian Liu,Tianling Ren
DOI: https://doi.org/10.1109/TUFFC.2006.1588409
2006-01-01
Abstract:This paper presents a novel, large-deflection piezoelectric folded cantilever microactuator (PFCM). A multimorph model for the large-deflection PFCM is derived, in which unified formulas for deflection angle and vertical displacement of N-level PFCM are obtained. Based on the model, multilayer PFCMs using PZT film are designed and optimized. The large-deflection PFCM is extensively applicable to m...
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