Abstract:Multi-degree of freedom piezoelectric actuators are strongly needed for industrial applications, especially when manipulating a large and heavy mirror or lens in an optical system. A novel three-degree-of-freedom piezoelectric actuator, which is driven by two pairs of piezo-stack actuator with spatial compliant mechanisms designed to guide the motion and preload the piezo-stack actuators, is herein proposed. The structure and working principle of the proposed actuator are illustrated and its kinematic characteristic is analyzed. The stiffness of the spatial compliant mechanisms is modeled, and the dynamic characteristics are analyzed, Finite Element method is utilized to validate the correctness of the stiffness modeling and the free vibration analysis of the proposed actuator. A prototype actuator is fabricated and its output performances have been tested. Working space of X ranging from -7.1 to 5.6 μm, Y ranging from -6.2 to 8.2 μm and Z ranging from -2.3 to 2.1 μm, displacement resolutions of 15/16/21 nm along X-/Y-/Z-axis and average velocities of 52.3, 82.8 and 29.5 µm/s along X-axis, Y-axis, and Z-axis with carrying load up to 2 kg and driving frequency of 500 Hz have been achieved by the prototype actuator. The method of waveform generating for the proposed actuator has been developed with the inverse hysteresis compensation, and test results indicate that the positioning accuracy of the prototype actuator in the open loop has been improved from 0.94 to 0.23 μm for a circular trajectory tracking, from 0.48 to 0.29 μmm for an elliptical trajectory tracking, and from 0.61 to 0.32 μm for a rectangular trajectory tracking with the compensated waveform of driving voltage.

Design, analysis and experiments of a linear piezoelectric actuator adopting a flexible mechanism with wing skeletal structure

Design and Control of a Piezoelectric Ceramic-actuated and Flexure Hinge-based Micromanipulator

Design, modeling, analysis and testing of a novel piezo-actuated XY compliant mechanism for large workspace nano-positioning

Design and Locomotion Study of Stick-Slip Piezoelectric Actuator Using Two-Stage Flexible Hinge Structure

Design and Experimental Research of a New Type of Piezoelectric Rotary Actuator

Improvement on the Structure Design of a Kind of Linear Piezoelectric Motor with Flexible Drive-Foot

The Design and Research on a New Piezoelectric Torsion Actuator

Modeling and Design Optimization of a New Piezoelectric Inchworm Actuator with Screw Clamping Mechanisms

Design and Development of a Piezoelectric Linear Actuator for Smart Structures

A Gravity-Assisted Piezoelectric Inertial Actuator for Bidirectional Smooth Drives by Single Excitation Source

A piezoelectric inchworm actuator of linear type using symmetrical lever amplification

A three-degree-of-freedom piezoelectric actuator with sandwich structure: Design, modeling, and experiment

A New X-Actuator Design for Controlling Wing Bending and Twisting Modes

Design and dynamic analysis of a novel compound bending hollow piezoelectric beam miniature rotary actuator

A novel stick-slip piezoelectric actuator is developed based on a parallelogram flexible drive mechanism to minimize shear force.

A piezoelectric inertial actuator operating with elliptical drive and stick-slip drive modes

Development and Analysis of Multi-Degree-of-Freedom Piezoelectric Actuator Based on Elephant Trunk Structure

Design and performance evaluation of a stick-slip actuator with Z-shaped beam and two-stage amplification system

Development of a three-degree-of-freedom piezoelectric actuator

Design and Experiment Evaluation of a Rotatable and Deployable Sleeve Mechanism Using a Two-DOF Piezoelectric Actuator.

Experiments and Study of a Low-Frequency, High-Speed Bi-Directional Piezoelectric Stick-Slip Actuator