[Analysis of the Apo E-rich HDL in plasma of patients with cholestasis and its clinical significance].

M. Seishima,F. Okuno,Y. Aoki,H. Yoshida,M. Yamada,T. Ando,Y. Muto,Y. Takahashi

1984-06-01

Abstract:

What problem does this paper attempt to address?

Investigation of a Complete Squeeze-Film Damping Model for MEMS Devices

Qianbo Lu,Weidong Fang,Chen Wang,Jian Bai,Yuan Yao,Jiaxiao Chen,Xiang Xu,Wei Huang

DOI: https://doi.org/10.1038/s41378-021-00279-6

2021-01-01

Microsystems & Nanoengineering

Abstract:Dynamic performance has long been critical for micro-electro-mechanical system (MEMS) devices and is significantly affected by damping. Different structural vibration conditions lead to different damping effects, including border and amplitude effects, which represent the effect of gas flowing around a complicated boundary of a moving plate and the effect of a large vibration amplitude, respectively. Conventional models still lack a complete understanding of damping and cannot offer a reasonably good estimate of the damping coefficient for a case with both effects. Expensive efforts have been undertaken to consider these two effects, yet a complete model has remained elusive. This paper investigates the dynamic performance of vibrated structures via theoretical and numerical methods simultaneously, establishing a complete model in consideration of both effects in which the analytical expression is given, and demonstrates a deviation of at least threefold lower than current studies by simulation and experimental results. This complete model is proven to successfully characterize the squeeze-film damping and dynamic performance of oscillators under comprehensive conditions. Moreover, a series of simulation models with different dimensions and vibration statuses are introduced to obtain a quick-calculating factor of the damping coefficient, thus offering a previously unattainable damping design guide for MEMS devices.
Destructive Reliability Analysis of Electromagnetic MEMS Micromirror Under Vibration Environment

Xiao-Yong Fang,Xiu-Yuan Li,Kai-Ming Hu,Ge Yan,Jia-Hao Wu,Wen-Ming Zhang

DOI: https://doi.org/10.1109/jstqe.2021.3124140

IF: 4.9

2022-09-01

IEEE Journal of Selected Topics in Quantum Electronics

Abstract:Micro-Electro-Mechanical Systems (MEMS) micro-mirrors have shown great potential in consumer applications, such as Light Detection and Ranging (LiDAR) devices and portable laser projectors. The LiDAR based on electromagnetic MEMS micro-mirror is usually exposed to vibration loads for autonomous vehicles, which results in the necessity for the destructive reliability assessment of micromirrors under vibration environment, but such studies are rarely reported. This paper explores the destructive reliability of electromagnetic MEMS micromirror under vibration environment according to the JESD22-B103B standard. The reliability evaluation is conducted by experimental tests, finite element stress analysis and theoretical dynamic response analysis. Micromirrors are tested under sweep excitation, and they are failed with the vibration level of around 33 g. The failure and stress analysis demonstrate that the crack fracture is located at the root of the slow axis. The nonlinear relationship between the peak displacement of the balance frame and acceleration levels is investigated through theoretical analysis. The nonlinearity of stiffness hardening is induced by the axial tensile strain of the beam, which contributes to the displacement-reduction of the gimbal. This work provides some valuable suggestions for the optimization design of MEMS micromirrors to improve the acceleration tolerance level in vibration environment.

engineering, electrical & electronic,optics,physics, applied,quantum science & technology
Experiments on Quasi-Static and Dynamic Control of a PVDF Laminated Membrane-Like Mirror

Yifan Lu,Honghao Yue,Zongquan Deng,Hornsen Tzou

DOI: https://doi.org/10.1115/imece2016-66265

2017-01-01

Abstract:Due to their merits of low areal density, in-orbit deploying and low manufacturing cost properties, membrane-like deformable mirrors meet the ultra-lightweight and large aperture demand of space optical mirror systems well. Membrane-like mirrors has therefore become a hot spot in the field of space science research now. Surface of these in-orbit membrane-like structures are susceptible to external environment variation on account of their low stiffness and high flexibility properties. Once excited by external excitations, the membrane vibration endures and this would not only degrade its performance, but also lead to system or structural failures. So dynamic vibration control of the membrane-like mirror is indispensable. When the orbiting mirror passes from Earth’s shadow into sunlight, the surface temperature of the mirror changes and this will render membrane thermal distortion. Hence, quasi-static surface error adjustment of the mirror is also requisite. In this paper, a 0.2m diameter scaled-down Kapton membrane-like mirror is taken as the experiment subject. Polyvinylidene Fluoride (PVDF) patches are laminated on the non-reflective side of the mirror as in-plane actuators. High precision laser displacement sensors are used to measure the surface deviation of the mirror. A modal vibration control system based on the positive position feedback (PPF) algorithm and a quasi-static surface control system based on the proportional error feedback algorithm are established respectively. Several mirror control experiments are performed and the results indicate that the methods proposed could suppress the membrane vibration and alleviate the membrane thermal deformation effectively.
FR4-Based Electromagnetic Scanning Micromirror Integrated with Angle Sensor

Hongjie Lei,Quan Wen,Fan Yu,Ying Zhou,Zhiyu Wen

DOI: https://doi.org/10.3390/mi9050214

IF: 3.4

2018-05-02

Micromachines

Abstract:This paper presents a flame retardant 4 (FR4)-based electromagnetic scanning micromirror, which aims to overcome the limitations of conventional microelectromechanical systems (MEMS) micromirrors for the large-aperture and low-frequency scanning applications. This micromirror is fabricated through a commercial printed circuit board (PCB) technology at a low cost and with a short process cycle, before an aluminum-coated silicon mirror plate with a large aperture is bonded on the FR4 platform to provide a high surface quality. In particular, an electromagnetic angle sensor is integrated to monitor the motion of the micromirror in real time. A prototype has been assembled and tested. The results show that the micromirror can reach the optical scan angle of 11.2 ∘ with a low driving voltage of only 425 mV at resonance (361.8 Hz). At the same time, the signal of the integrated angle sensor also shows good signal-to-noise ratio, linearity and sensitivity. Finally, the reliability of the FR4 based micro-mirror has been tested. The prototype successfully passes both shock and vibration tests. Furthermore, the results of the long-term mechanical cycling test (50 million cycles) suggest that the maximum variations of resonant frequency and scan angle are less than 0.3% and 6%, respectively. Therefore, this simple and robust micromirror has great potential in being useful in a number of optical microsystems, especially when large-aperture or low-frequency is required.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Air Damping Characteristics of a 2D MEMS Electromagnetically Driven Micro-Mirror

Mingdi Peng,Xinhua Zhu,Bo Jiang,Tong Zhou,Yan Su

DOI: https://doi.org/10.1007/s00542-018-4231-5

2018-01-01

Microsystem Technologies

Abstract:Two-dimensional micromirror works as a resonant actuator applied in light detection and ranging (LiDAR) devices. The reflected mirror rotates regularly around two axes under controllable Lorentz force. It is expensive to manufacture a vacuum cave to provide high enough space in perpendicular for swing and meet the requirement for optical transmission in the motion. Air damping takes a dominant role when the structure operates in atmosphere, and affects dynamic performance of micromirror. The paper estabishes the air damping model which is helpful to describe the motion of the micromirror. Firstly, the paper presents three degrees of freedom (DOF) dynamic model of two dimensional micromirror driven by electromagnetically forces. Optimized structure was obtained according to the established model and the resonant modes were in good agreement with the finite-element simulations. Q-factor corresponding to each resonant modes of the micromirror operating in the atmosphere was derived through viscous damping theory. In the process, the fluid–solid-interaction (FSI) method was used to address the flow filed distributions. The simulation illustrates that the damping in slow scanning mode is much bigger than the value in fast scanning mode, which means the influence of structure size on damping is greater than that of rotation frequency. The frequency dependent response experiments were carried out to measure the Q-factor of the micromirror. The experimental results are in good agreement with simulation, verifying the viscous damping model is suitable for the case.
Evaluation of Residual Stress in MEMS Micromirror Die Surface Mounting Process and Shock Destructive Reliability Test

Xiao-Yong Fang,Chun-Cheng Liu,Xiu-Yuan Li,Jia-Hao Wu,Kai-Ming Hu,Wen-Ming Zhang

DOI: https://doi.org/10.1109/jsen.2023.3283511

IF: 4.3

2023-01-01

IEEE Sensors Journal

Abstract:Light detection and ranging (LiDAR) devices based on micro-electromechanical systems (MEMS) micromirrors have been promising sensors for automatic driving due to the advantages of MEMS devices. The packaging plays a vital role in the reliability of MEMS micromirror but introduces the residual stress from the surface mounting process. The shock reliability of micromirrors is influenced by residual stress. In this work, the residual stress from the surface mounting process is investigated through resonant frequency tests. The frequency drift can be 718 and −281 Hz under the residual stress of 107.0 and −25.0 MPa, respectively. As the difference of coefficient of thermal expansion (CTE) rises, the residual stress proportionally increases but decreases with the thickness of the substrate. In addition, a higher curing temperature can introduce a more significant stress level. The dynamic response in a shock environment under different residual stress is analyzed. Drop fall experiments verify the theoretical conclusions that the stiffness hardening effect can improve the shock level tolerance. The tensile stress levels of 41.7 and 107.0 MPa are corresponding to 100 and 200 g, respectively. The influences of residual stress on frequency drift and reliability need to be considered seriously and simultaneously during the packaging design for MEMS micromirrors. This work provides a deep insight into the commercial applications of MEMS-based LiDAR in autonomous driving.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
Design and investigation of dual-axis electrostatic driving MEMS scanning micromirror

Longqin Wu,Yu-Sheng Lin

DOI: https://doi.org/10.1080/15599612.2024.2350749

2024-05-23

International Journal of Optomechatronics

Abstract:Micro-electro-mechanical system (MEMS) is once proposed in 1970s and evolving rapidly. Current researchers are seeking for better designs and better applications for MEMS actuators. This work presents an electrostatic driven dual-axis scanning micromirror, i.e., two-dimensional (2D) scanning micromirror with mirror size of 500 μm × 500 μm. The scanning mirror is implemented by using bulk micromachining process on silicon on insulator (SOI) substrate, which is compatible with present complementary metal oxide semiconductor (CMOS) manufacturing technology. The scanning frequency of the slow axis and the fast axis is 4.87 kHz and 31.15 kHz, respectively. The impact factors of the dimensions of comb fingers and torsion beams are analyzed and discussed in this study. Under the driving voltage difference of 100 volts and 70 volts, the deviation angle is 4.57° × 13.08°. Therefore, a simple design of a dual-axis MEMS scanning micromirror is proposed, which can be precisely controlled without additional complex sensors or circuits.

engineering, mechanical, electrical & electronic,optics
Design of an Electromagnetic Micro Mirror Driving System for LiDAR

Jie Chen,Haiqiang Zhang,Zhongjin Zhang,Wenjie Yan

DOI: https://doi.org/10.3390/s24123969

IF: 3.9

2024-06-20

Sensors

Abstract:Electromagnetic micro mirrors are in great demand for light detection and ranging (LiDAR) applications due to their light weight and low power consumption. The driven frequency of electromagnetic micro mirrors is very important to their performance and consumption. An electromagnetic micro mirror system is proposed in this paper. The model of the system was composed of a micro mirror, an integrated piezoresistive (PR) sensor, and a driving circuit was developed. The twisting angle of the mirror edge was monitored by an integrated PR sensor, which provides frequency feedback signals, and the PR sensor has good sensitivity and linearity in testing, with a maximum of 24.45 mV/deg. Stable sinusoidal voltage excitation and frequency tracking was realized via a phase-locked loop (PLL) in the driving circuit, with a frequency error within 10 Hz. Compared with other high-cost solutions using PLL circuits, it has greater advantages in power consumption, cost, and occupied area. The mechanical and piezoresistive properties of micro mirrors were performed in ANSYS 19.2 software. The behavior-level models of devices, circuits, and systems were validated by MATLAB R2023a Simulink, which contributes to the research on the large-angle deflection and low-power-consumption drive of the electromagnetic micro mirror. The maximum optical scan angle reached 37.6° at 4 kHz in the behavior-level model of the micro mirror.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
Design of bi-axial piezoelectric MEMS micro mirror with gimbal actuator for dynamic decoupling

Hui-Ming Yang,Chih-Chen Hsu,Po-Chun Lin,Hung-Yu Lin,Si-Han Chen,Hao-Chien Cheng,Weileun Fang

DOI: https://doi.org/10.1088/1361-6439/ad7a7e

2024-09-24

Journal of Micromechanics and Microengineering

Abstract:This study presents a novel structural design of a bi-axial piezoelectric micro-electro-mechanical-systems scanning mirror aimed at preventing the dynamic coupling between the two scanning axes and avoiding distortion of the scanning pattern. In the proposed design, the gimbal actuator, constrained by torsional springs at both ends, not only serves as the torque generation component for the actuation of one axis but also acts as a pivot to prevent structural interference between the two axes during scanning. This approach achieves the advantages of decoupling and compactness simultaneously. Simulations indicate that the gimbal actuator experiences very small displacement during y-axis actuation, thus realizing the dynamic decoupling from the x-axis scanning unit. To evaluate the proposed designs, fabrication processes were adopted on a silicon-on-insulator wafer with a lead zirconium titanate film. The miniaturized scanners, featuring a mirror with a 1.2 mm diameter, were realized on a compact 5 × 5 mm 2 chip. Measurements indicate that the resonant frequencies of x-axis and y-axis scanning are 2.69 kHz and 4.29 kHz, respectively, and the optical scanning angles reach 33° and 21° under an 8 V pp driving voltage. Additionally, measurements show that the displacement ratio between the central mirror and the gimbal actuator can reach up to 17 during y-axis actuation, verifying the concept of dynamic decoupling. The bi-axial Lissajous scanning pattern with straight edges also demonstrates the effective decoupling by the proposed gimbal actuator design.

engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Active vibration control of a polyvinylidene fluoride laminated membrane plate mirror

Yifan Lu,Marco Amabili,Jian Wang,Fei Yang,Honghao Yue,Ye Xu,Hornsen Tzou

DOI: https://doi.org/10.1177/1077546319862445

IF: 2.633

2019-07-11

Journal of Vibration and Control

Abstract:Lightweight optical mirrors usually play key roles in aerospace and optical structural systems applied to space telescopes, radars, solar collectors, communication antennas, etc. Due to their high flexibility and low damping properties, external excitations such as orbital maneuver may induce unexpected oscillations and thus reduce their working performance. Active vibration control is therefore essential for the lightweight optical mirror systems. In this spirit, a lightweight mirror structronic system with a linear quadratic optimal controller is presented. The mirror is modeled as a membrane plate with pretension and distributed polyvinylidene fluoride sensors and actuators. The sensing sensitivity of the piezoelectric (PVDF) sensors and the modal actuation factor of the PVDF actuators are derived. The state-space equations are established and the feedback control gains between sensing and control signals are obtained. Sensor and actuator of different shape, size, and position are employed to actively control the first four natural modes of the mirror. The influences of mode order, pretension, and the two weighting factors Q and R on the control performance are also investigated. Analytical results in this paper could guide the design and layout of the PZT sensor and actuator on lightweight membrane plate mirrors.

engineering, mechanical,mechanics,acoustics
Design of Butterfly Plate Piezoelectric Actuator with Dual Driving Electrodes for MEMS Micro-Mirror

Si-Han Chen,Shih-Chi Liu,Hao-Chien Cheng,Hung-Yu Lin,Kai-Chih Liang,Mingching Wu,Weileun Fang

DOI: https://doi.org/10.1109/mems49605.2023.10052250

2023-01-01

Abstract:This study presents a novel butterfly-plate piezoelectric actuator to drive MEMS micro-mirror with decent scanning angle and frequency at low voltage. The micro-mirror is driven by four butterfly-plate actuators around the mirror plate. Merits of this study are, (1) butterfly-plate actuators with dual driving electrodes: butterfly-plate actuator has larger PZT area (than cantilever actuator) to contribute higher driving force, and the round corner on butterfly-plate is to remove the structure with larger bending caused by residual stress. The dual driving electrodes is exploited to further enhance the output displacement. (2) boundary of actuator: the proposed boundary condition of actuators could reduce the constraint of butterfly-plate to enhance its output displacement. Measurements demonstrate the proposed micro-mirror has 38-degree scanning angle with scanning frequency of 25.5 kHz when driving at 12 V-pp.
Design and Simulation of MEMS Thermal and Vibration Isolator Based on PDMS Beam Arrays.

Kaisi Xu,Ningli Zhu,Shan Cao,Weiguo Su,Wei Zhang,Yilong Hao

DOI: https://doi.org/10.1109/nems.2016.7758235

2016-01-01

Scientia Forestalis

Abstract:This paper proposes a MEMS thermal and vibration isolator to be integrated with micro devices. The isolator is able to generate an attenuated thermal and vibration condition via lock-shaped polydimethylsiloxane (PDMS) beam arrays due to the ultra-low thermal conductivity and Young modulus of PDMS. Thermal simulations have been carried out to indicate the efficient heat resistance of the isolator in both static and transient heat transfer processes. And harmonic response simulations have also been conducted to test the performance of vibration isolation. This approach decouples the design of harsh environment resistance from the device design, guaranteeing device performance in both thermal and vibration working conditions. It may broaden the application domains of MEMS devices, especially in military and space missions.
Static and Dynamic Mechanical Behaviors of Electrostatic MEMS Resonator with Surface Processing Error

Jingjing Feng,Cheng Liu,Wei Zhang,Shuying Hao

DOI: https://doi.org/10.3390/mi9010034

IF: 3.4

2018-01-17

Micromachines

Abstract:The micro-electro-mechanical system (MEMS) resonator developed based on surface processing technology usually changes the section shape either due to excessive etching or insufficient etching. In this paper, a section parameter is proposed to describe the microbeam changes in the upper and lower sections. The effect of section change on the mechanical properties is studied analytically and verified through numerical and finite element solutions. A doubly-clamped microbeam-based resonator, which is actuated by an electrode on one side, is investigated. The higher-order model is derived without neglecting the effects of neutral plane stretching and electrostatic nonlinearity. Further, the Galerkin method and Newton⁻Cotes method are used to reduce the complexity and order of the derived model. First of all, the influence of microbeam shape and gap variation on the static pull-in are studied. Then, the dynamic analysis of the system is investigated. The method of multiple scales (MMS) is applied to determine the response of the system for small amplitude vibrations. The relationship between the microbeam shape and the frequency response is discussed. Results show that the change of section and gap distance can make the vibration soften, harden, and so on. Furthermore, when the amplitude of vibration is large, the frequency response softening effect is weakened by the MMS. If the nonlinearity shows hardening-type behavior at the beginning, with the increase of the amplitude, the frequency response will shift from hardening to softening behavior. The large amplitude in-well motions are studied to investigate the transitions between hardening and softening behaviors. Finally, the finite element analysis using COMSOL software (COMSOL Inc., Stockholm, Sweden) is carried out to verify the theoretical results, and the two results are very close to each other in the stable region.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Theoretical modeling and experimental investigation of in-phase resonant MEMS mirrors with cascaded structures

Wenhao CHEN,Huahuang LUO,Hadi Tavakkoli,Mingzheng DUAN,Wibool Piyawattanametha,Yi-Kuen Lee

DOI: https://doi.org/10.1088/1361-6439/ad3763

2024-03-27

Journal of Micromechanics and Microengineering

Abstract:This paper proposes an efficient nonlinear one-dimensional(1D) compact mass-damper-spring model to predict the dynamic response of electrostatic resonant MEMS mirrors with cascaded structure The time-dependent damping moment due to viscous shear and pressure drag is computed using semi-empirical analytical equations for comb-drive structures and device frames. Nonlinear electrostatic force induced by the comb drives is efficiently acquired based on the hybrid method. The optimized device is fabricated using MEMS fabrication processes using a 4-inch SOI wafer. The proposed compact model with the measured key parameters from the fabricated device shows excellent capability to accurately predict nonlinear dynamic responses of the fabricated device, including parametric excitation and hysteretic frequency response, with an average error of less than 5%. In particular, our 1D model is three orders of magnitude faster than the conventional finite element method (FEM) model (0.8s versus 1h), enabling efficient system-level optimization of the critical design parameters. Based on the parametric study, electrode gap distance and torsion spring width are found to be two critical design parameters and dimensional analysis is conducted for design optimization with scan angle enhancing from 16.8° to 24° compared with the first design.

engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
On the Design of Piezoelectric actuator for 1D MEMS scanning mirror applications

Shih-Chi Liu,Hao-Chien Cheng,Si-Han Chen,Hung-Yu Lin,Chih-Chen Hsu,Fuchi Shih,Kai-Chih Liang,Mingching Wu,Weileun Fang

DOI: https://doi.org/10.1088/1361-6439/acb4a2

2023-01-20

Journal of Micromechanics and Microengineering

Abstract:This study presents the design, implementation, and characterization of 1D resonant type micro-electro-mechanical-systems piezoelectric scanning mirrors with different actuator designs to investigate their influences on the figure of merits (FoM) for automotive LiDAR application. The MEMS scanning mirrors are driven by PZT thin film in this study owing to its outstanding piezoelectric properties. Three different beam-type piezoelectric actuators are designed, including the reference meander straight-beam actuator design, and the proposed meander curved-beam and straight-curved tapered beam actuator designs. Simulations show the scan angle enhancement for two proposed designs, yet the resonant scanning frequency of meander curved-beam design dropped to below the 2 kHz requirement. To evaluate the designs, scanning mirrors with two proposed actuators are fabricated and tested. Measurements show that the resonant frequencies for the two proposed MEMS scanning mirrors are 1735 Hz and 2578 Hz, respectively. Two proposed designs respectively have the maximum optical angles of 48.1° and 50.6° at the 20 Vpp driving voltage. Due to the much higher stress on the beam structure induced by the misalignment of PZT film, the actuator could not reach the predicted scanning angle of near 80°. In comparison of the two proposed designs, the straight-curved tapered beam actuator design could enhance the FoM for about 56%. In summary, the performances of piezoelectric MEMS scanning mirror can be improved by varying the designs of length and shape of actuator, and the distribution of PZT film on the suspended actuator is also a critical design concern.

engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Response Analysis of a 2D MEMS Electromagnetically Driven Micro-Mirror

Mingdi Peng,Xinhua Zhu,Bo Jiang,Tong Zhou,Yan Su

DOI: https://doi.org/10.1109/ICAM.2018.8596383

2018-01-01

Abstract:As a MEMS actuator device, the 2D micro-mirror works in two resonant modes to realize biaxial deflection in light detection and ranging (LiDAR) system. By Changing the exit angle of the incident laser, the three-dimensional information of a space object can be received. This paper researches on the response problem of one kind of 2D electromagnetically driven micro-mirror by numerical analysis and finite element analysis method. The aim of response analysis is to obtain the angle matching of biaxial deflection under a certain proportional driving force. The dynamic model of the mirror was established firstly. Then, a numerical method called Newmark-β method was used to design optimized structure and simulate time domain response of the mirror. The ratio of slow to fast axis angle is 5.156:1 when taking the damping factor into account. The finite element analysis was carried out to further verify the results of the response analysis. By frequency domain response experiment, the ratio of slow and fast angle was 5.04:1, which confirmed the angle matching relationship of slow and fast axis near resonant frequency.
Dual-Axis Piezoelectric Mems Micromirror with Adjustable Aspect Ratio of Lissajous Patterns Through Structure Design and Electrode Arrangement

Po-Chun Lin,Chih-Chen Hsu,Hui-Ming Yang,Hung-Yu Lin,Si-Han Chen,Weileun Fang

DOI: https://doi.org/10.1109/mems58180.2024.10439439

2024-01-01

Abstract:This study presents a novel structure and electrode design to realize the dual-axis piezoelectric MEMS scanning mirror. The design features include: (1) Two-stage curved actuator array for 2-D scanning: each curved actuator consists of the trapezoid-plate and ring-plate units driven respectively by different electrodes. Through the proposed structure and electrode designs, different aspect ratios of scanning patterns are achieved by simply altering the input-ports of driving signals. (2) Electrode pattern: the electrode pattern is designed based on stress distributions of the structure to improve output displacement. (3) S-shaped spring: spring width is designed to reduce stress during scanning. Measurement results demonstrate the proposed design reaches 30° for X-axis scanning at 5.45 kHz (8 V pp ) and 20° for Y-axis at 5.2 kHz (6 V pp ). It can also show Lissajous scanning patterns with various aspect ratios by easily applying driving signals to different actuator units.
A novel quasi-static MEMS piezoelectric micromirror array with a high fill factor and three degrees of freedom

Yongquan Su,Yichen Liu,Yang Wang,Qianying Sun,Qifeng Qiao,Zhichao Weng,Lihao Wang,Zhenyu Wu

DOI: https://doi.org/10.1016/j.sna.2024.115597

IF: 4.291

2024-06-23

Sensors and Actuators A Physical

Abstract:This paper presents the design of a novel 3×3 piezoelectric micromirror array (PMMA) with an 84.6 % fill factor and describes a three-dimensional hidden fabrication platform. The fabricated device operates with quasi-static mode in 3-degree-of-freedom, namely tip, tilt, and piston. In order to achieve a high fill factor, a three-dimensional hidden micromirror array structure is introduced, and is realized through multi-layer bonding. In addition, a double-stop-layer's glass cover for optical device was employed to realize transparent wafer-level packaging. The device testing result achieves a mechanical tilting angle of 4.4 mrad at 82.5 V DC with over 99.5 % linearity. This design has the potential to achieve a larger size of micromirror arrays.

engineering, electrical & electronic,instruments & instrumentation
A Large-Scan-Range Electrothermal Micromirror Integrated with Thermal Convection-Based Position Sensors

Anrun Ren,Yingtao Ding,Hengzhang Yang,Teng Pan,Ziyue Zhang,Huikai Xie

DOI: https://doi.org/10.3390/mi15081017

2024-08-08

Abstract:This paper presents the design, simulation, fabrication, and characterization of a novel large-scan-range electrothermal micromirror integrated with a pair of position sensors. Note that the micromirror and the sensors can be manufactured within a single MEMS process flow. Thanks to the precise control of the fabrication of the grid-based large-size Al/SiO2 bimorph actuators, the maximum piston displacement and optical scan angle of the micromirror reach 370 μm and 36° at only 6 Vdc, respectively. Furthermore, the working principle of the sensors is deeply investigated, where the motion of the micromirror is reflected by monitoring the temperature variation-induced resistance change of the thermistors on the substrate during the synchronous movement of the mirror plate and the heaters. The results show that the full-range motion of the micromirror can be recognized by the sensors with sensitivities of 0.3 mV/μm in the piston displacement sensing and 2.1 mV/° in the tip-tilt sensing, respectively. The demonstrated large-scan-range micromirror that can be monitored by position sensors has a promising prospect for the MEMS Fourier transform spectrometers (FTS) systems.
Crosstalk-free large aperture electromagnetic 2d micromirror for lidar application

Behrad Ghazinouri,Siyuan He

DOI: https://doi.org/10.1088/1361-6439/ace453

2023-07-06

Journal of Micromechanics and Microengineering

Abstract:This paper presents a novel design of a 2D electromagnetic micromirror without crosstalk. The proposed micromirror uses a flexible printed circuit board (FPCB) and four layers of coils embedded in the polyimide layers. The insulated layers of the coil allow for independent actuation of the mirror plate to rotate about two orthogonal axes. The diamond shaped micromirror uses a hyperbola-shaped magnetic field on the coils under the mirror plate and a 45-degrees magnetic field on the coils embedded in the FPCB frame to eliminate the mechanical crosstalk. Finite element analysis (FEA) was used to predict the novel 2D micromirror's behavior. The novel 2D micromirror prototype is used in scanning LiDAR with good results. The experimental test has verified the novel crosstalk-free 2D micromirror working principle and showed good scanning quality: no crosstalk and a higher field of view. The novel 2D micromirror prototype has a large aperture: e.g., 19x19 mm2 , which is very suitable for coaxial scanning LIDAR.

engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied

[Analysis of the Apo E-rich HDL in plasma of patients with cholestasis and its clinical significance].

Investigation of a Complete Squeeze-Film Damping Model for MEMS Devices

Destructive Reliability Analysis of Electromagnetic MEMS Micromirror Under Vibration Environment

Experiments on Quasi-Static and Dynamic Control of a PVDF Laminated Membrane-Like Mirror

FR4-Based Electromagnetic Scanning Micromirror Integrated with Angle Sensor

Air Damping Characteristics of a 2D MEMS Electromagnetically Driven Micro-Mirror

Evaluation of Residual Stress in MEMS Micromirror Die Surface Mounting Process and Shock Destructive Reliability Test

Design and investigation of dual-axis electrostatic driving MEMS scanning micromirror

Design of an Electromagnetic Micro Mirror Driving System for LiDAR

Design of bi-axial piezoelectric MEMS micro mirror with gimbal actuator for dynamic decoupling

Active vibration control of a polyvinylidene fluoride laminated membrane plate mirror

Design of Butterfly Plate Piezoelectric Actuator with Dual Driving Electrodes for MEMS Micro-Mirror

Design and Simulation of MEMS Thermal and Vibration Isolator Based on PDMS Beam Arrays.

Static and Dynamic Mechanical Behaviors of Electrostatic MEMS Resonator with Surface Processing Error

Theoretical modeling and experimental investigation of in-phase resonant MEMS mirrors with cascaded structures

On the Design of Piezoelectric actuator for 1D MEMS scanning mirror applications

Response Analysis of a 2D MEMS Electromagnetically Driven Micro-Mirror

Dual-Axis Piezoelectric Mems Micromirror with Adjustable Aspect Ratio of Lissajous Patterns Through Structure Design and Electrode Arrangement

A novel quasi-static MEMS piezoelectric micromirror array with a high fill factor and three degrees of freedom

A Large-Scan-Range Electrothermal Micromirror Integrated with Thermal Convection-Based Position Sensors

Crosstalk-free large aperture electromagnetic 2d micromirror for lidar application