Abstract:This research is on the dynamics of electrostatically actuated radial-contour mode microring resonators. The governing equation of motion is derived by the minimization of the Hamiltonian and generalized to include the viscous damping effect. The Galerkin method is used to discretize the distributed-parameter model of the considered ring resonator. The influences of intermolecular forces such as van der Waals and Casimir on the dynamic behavior of the resonator are investigated. The natural frequencies and mode shapes of the ring are calculated for various values of ratio of radii (\b{eta}). The effect of the design parameters including ring radius, electrostatic voltage and quality factor on the dynamic responses, is discussed. The results of present study can be used in the design of novel MEMS resonators, RF filters and channelizers.

Intermolecular Interactions in Radial-Contour Mode Microring Resonators