The Study on the Epoxy Resin Compound X-ray Refractive Lens - Art. No. 60320U

Jieying Liang,Zichun Le,Lina Peng,Wenjie Wan,Fei‐Yan Yi,Bisheng Quan,Jun Yao,J Zhang,Wen‐Shuai Dong,Xuan Ma
2006-01-01
Abstract:In this paper, the authors report their resent results of the study on the epoxy resin compound X-ray refractive lens. At the first, the theoretical results of the structure parameters for such a device are given. Then, the fabrication technologies are presented. They are deep soft X-ray lithography, mold-manufacturing and molding. The material of X-ray photoresist is PMMA, the mold is made of silicone rubber, and the material of the lens is epoxy resin. Some measured results by means of optical microscope and SEM are also shown. The structure height of the epoxy resin compound lens is measured to be 500 micrometers.
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