Comparisons of Structural and Optical Properties of ZnO Films Grown on (0 0 0 1) Sapphire and (0 11¯2) Sapphire by Low-Pressure MOCVD

Yuantao Zhang,Guotong Du,Huichao Zhu,Changmin Hou,Keke Huang,Shuren Yang

DOI: https://doi.org/10.1016/j.optmat.2004.03.019

IF: 3.754

2004-01-01

Optical Materials

Abstract:ZnO films were grown on (0 0 0 1) orientation (C-plane) and (0 1¯ 1 2) orientation (R-plane) sapphire substrates by low-pressure metalorganic chemical vapor deposition (MOCVD). The crystallinity, surface morphology and optical properties of ZnO films on C and R sapphires were investigated using X-ray diffraction (XRD), scanning electron microscopy (SEM), photoluminescence (PL) spectrum and transmission spectrum, respectively. The XRD patterns of the films indicated that ZnO grew on C sapphire with a (0 0 0 2) orientation, while (1 1 2¯ 0) ZnO grew on R sapphire. The epitaxial relationships of the two films were determined by X-ray θ−2θ and ϕ scans. The SEM images exhibited that the ZnO film grown on C sapphire had a columnar morphology, and that the ZnO film on R sapphire possessed a smooth and dense surface. The room temperature PL spectra showed that both of the films had a good optical quality, but the intensity of the near band-edge emission (NBE) peak of the ZnO film on C sapphire was more intense than that of the film on R sapphire. Besides, the transmission spectra showed that the two ZnO films were highly transparent in the visible region.