Abstract:The (110) textured ZnO films with c-axes lying in R-sapphire substrate planes are deposited by RF magnetron sputtering. The focusing investigation is the effect of substrate position in the sputtering on structural and acoustic properties of the ZnO films on the sapphire. The crystallographic characteristics of the films are characterized by X-ray diffraction (XRD) analysis. It is found that the crystalline orientation of the ZnO film varies with the substrate position deflected from the center of the target. The XRD spectra of the films show that there is an optimized substrate position, at which the strongest (110) peak of the ZnO film can be obtained. However, with the decrease or further increase of the deflection, the (110) diffraction intensity decreases and additional diffraction peaks of (002), (102) and (103) emerge. In order to investigate the variations of acoustic properties of these films, the ZnO piezoelectric films are deposited on R-sapphire substrates with different deflection positions, and the bilayered structures are used to fabricate film bulk acoustic resonators (FBARs). The results show that the electromechanical coupling coefficients k15 of the shear mode acoustic waves excited by FBARs also vary with the different positions similar to that shown by the XRD spectra.

Rutherford Backscattering and Optical Studies for Zno Thin Films on Sapphire Substrates Grown by Metalorganic Chemical Vapor Deposition

The Effects of Oxygen Partial Pressure and Substrate Temperature on the Structural and Optical Properties of Zno Films

Effect of Solution Concentrations on Crystal Structure, Surface Topographies and Photoluminescence Properties of ZnO Thin Films

Comparisons of Structural and Optical Properties of ZnO Films Grown on Sapphire and Si(001)

Epitaxial Growth Of Zno On Gan/Sapphire Substrate By Radio-Frequency Magnetron Sputtering

Structural and Optical Studies of Mg(X)Zn(1-X)Ofilms Grown on Sapphire

Optical Properties and Structural Characteristics of Zno Thin Films Grown on A-Plane Sapphire Substrates by Plasma-Assisted Molecular Beam Epitaxy

Structural and Optical Characterizations of ZnO Films Grown by Reactive Electron Beam Evaporation

Deposition of ZnO Films with C-Axes Lying in R-sapphire Substrate Planes

Residual strains and optical properties of ZnO thin epilayers grown on r-sapphire planes

Effects of deposition conditions on the structural and acoustic characteristics of (1120) ZnO thin films on R-sapphire substrates.

Initial growth behavior and resulting microstructural properties of heteroepitaxial ZnO thin films on sapphire (0001) substrates

Growth of high-quality ZnO thin films on (11\bar{2}0) a-plane sapphire substrates by plasma-assisted molecular beam epitaxy

Characteristics of Surface Acoustic Waves Excited by (1120) Zno Films Deposited on R-sapphire Substrates

Microstructure Study of Zno Thin Films on Si Substrate Grown by Mocvd

Structural and Optical Properties of Nonpolar $(11 \bar{2}0)$ ZnO Films Grown by Plasma-Assisted Molecular-Beam Epitaxy

The structure and optical characters of the ZnO film grown on GaAs/Al2O3 substrate

Growth of Epitaxial C-Plane Zno Film on A-Plane Sapphire by Radio Frequency Reactive Magnetron Sputtering

Influences of Substrate and Annealing on the Structural and Optical Properties and Photoluminescence of Nanocrystalline Zno Films Prepared by Plasma Assisted Pulsed Laser Deposition

Mocvd Growth and Properties of Zno Films Using Dimethylzinc and Oxygen

Structural, Morphology and Optical Properties of Epitaxial Zno Films Grown on Al2o3 by Mocvd