Luminescence Studies of Er:Ga2O3 Films: Effect of Growth and Annealing Temperatures and Oxygen Pressures
Yonggang Liu,Xu Wang,Yucheng Jiang,Anpeng He,Jiqiang Ning,Bing Wang,Junxiao Yang,Daqiang Gao,Ziyang Zhang
DOI: https://doi.org/10.1166/jnn.2018.16060
2018-01-01
Journal of Nanoscience and Nanotechnology
Abstract:Er3+ doped Ga2O3 is a very promising material for data storage, full color display and white light emitting devices due to its sharp green emission, large direct bandgap, and thermal and chemical stability. In this paper, we report the growth of Er3+ doped Ga2O3 films on (111) silicon substrates by using the method of pulsed laser deposition with a series of varied growth conditions that include substrate temperature and O-2 pressure. The results of cathodoluminescence measurements reveal that the Er3+ doped Ga2O3 films, grown at the substrate temperature of 450 degrees C and O-2 pressure of 0.1 mbar, exhibit a strong green emission. The Er3+ doped Ga2O3 films were thermally treated at temperatures ranging from 800 to 1000 degrees C, and the X-ray diffraction analysis indicates that annealing temperature of 900 degrees C leads to the best crystal quality. Moreover, we have also found that the cathodoluminescence of Er3+ doped Ga2O3 films can be significantly increased by the thermal treatment at 900 degrees C. To explain the cathodoluminescence mechanism of Er3+ doped Ga2O3 film, the band structure and electronic transitions in Er3+ doped Ga2O3 material have been discussed and clarified in detail. This work presents a pathway towards the applications of the Er3+ doped Ga2O3 material in optoelectronic devices.