High-Speed and One-Step Deposition of a LiCoO2 Thin-Film Electrode by a High-Repetition 1064 nm Nd:YAG Fiber Laser

Kaidi Yuan,Miao Xie,Wujie Dong,Pei Zhao,Jun Pan,Zhanqiang Liu,Xiaoming Xie,Wei Peng,Fuqiang Huang
DOI: https://doi.org/10.1021/acsaem.2c02826
IF: 6.4
2022-01-01
ACS Applied Energy Materials
Abstract:All-inorganic solid-state batteries (AISSBs) attract great research interest due to the benefits in safety and energy density. The thinfilm battery, based on vacuum technology, is a type of AISSB that could reduce the thickness of a solid-state electrolyte to a few microns and provide void-free electrode-electrolyte contact. The key step of fabricating the thin-film battery is the deposition technique. Conventional pulsed laser deposition (PLD), which uses an excimer laser as energy source, is considered a promising technique but suffers from drawbacks like high cost, low speed, small scale, and consumption of rare/toxic working gases. Here, we introduce a high-repetition 1064 nm Nd:YAG fiber laser to replace the excimer laser for PLD application. This type of laser is solidstate and small in size, and its kHz to MHz repetition rate enables high deposition speed. This work focuses on the deposition of the LiCoO2 electrode, as a demonstration of this novel PLD. The growth rate reached 1 nm/s in an area of similar to 15 cm2. Controlling parameters such as vacuum level and substrate temperature (limited to 550 degrees C in this work) were explored. It was found that high-quality LiCoO2 thin film prefers rough vacuum and high temperature. The electrochemical performances of the electrodes were evaluated in half-cells. The specific capacity is dependent on film thickness and charge/discharge rate: a value of 90 mAh/g was achieved for a 1.31 mu m sample at 0.2 C, while 118 mAh/g was reached for a 0.27 mu m sample at 0.5 C. The long-term cycling performance of a 0.43 mu m sample showed 80% capacity retention after 565 charge-discharge cycles at 0.5 C. These preliminary results demonstrate that the Nd:YAG fiber-laser-based PLD can be a promising method for producing thin-film electrodes in large scale.
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