Abstract:All-inorganic solid-state batteries (AISSBs) attract great research interest due to the benefits in safety and energy density. The thin-film battery, based on vacuum technology, is a type of AISSB that could reduce the thickness of a solid-state electrolyte to a few microns and provide void-free electrode–electrolyte contact. The key step of fabricating the thin-film battery is the deposition technique. Conventional pulsed laser deposition (PLD), which uses an excimer laser as energy source, is considered a promising technique but suffers from drawbacks like high cost, low speed, small scale, and consumption of rare/toxic working gases. Here, we introduce a high-repetition 1064 nm Nd:YAG fiber laser to replace the excimer laser for PLD application. This type of laser is solid-state and small in size, and its kHz to MHz repetition rate enables high deposition speed. This work focuses on the deposition of the LiCoO2 electrode, as a demonstration of this novel PLD. The growth rate reached 1 nm/s in an area of ∼15 cm2. Controlling parameters such as vacuum level and substrate temperature (limited to 550 °C in this work) were explored. It was found that high-quality LiCoO2 thin film prefers rough vacuum and high temperature. The electrochemical performances of the electrodes were evaluated in half-cells. The specific capacity is dependent on film thickness and charge/discharge rate: a value of 90 mAh/g was achieved for a 1.31 μm sample at 0.2 C, while 118 mAh/g was reached for a 0.27 μm sample at 0.5 C. The long-term cycling performance of a 0.43 μm sample showed 80% capacity retention after 565 charge–discharge cycles at 0.5 C. These preliminary results demonstrate that the Nd:YAG fiber-laser-based PLD can be a promising method for producing thin-film electrodes in large scale.

Fabrication of thin-film batteries composed of LiCoO2, Li3PO4, and Li layers

Off-Stoichiometry Induced Few-Nanometer Surface Layer for High-Performance Layered Cathode in Nonaqueous and Aqueous Electrolytes

Li metal coated with Li3PO4 film via atomic layer deposition as battery anode

Fabrication of Solid-State Thin-Film Batteries Using LiMnPO4 Thin Films Deposited by Pulsed Laser Deposition

All-Solid-State Thin Film Lithium Batteries With Licoo2 Cathodes

Layered Li(Ni[sub 1/4]mn[sub 1/2]co[sub 13])o[sub 2] As Cathode Material for All-Solid-State Thin-Film Rechargeable Lithium-Ion Batteries

Fabrication and Electrochemical Properties of Three-Dimensional Structure of LiCoO[sub 2] Fibers

Thin Free-Standing Sulfide/Halide Bilayer Electrolytes for Solid-State Batteries Using Slurry Processing and Lamination

Layer-by-Layer Assembly of Strong Thin Films with High Lithium Ion Conductance for Batteries and Beyond

High-Speed and One-Step Deposition of a LiCoO 2 Thin-Film Electrode by a High-Repetition 1064 nm Nd:YAG Fiber Laser

Fabrication and Electrochemical Properties of All Solid State 0.3Ag-V2o5│lipon│li Thin Film Battery

LiCoPO4-based ternary composite thin-film electrode for lithium secondary battery

Wet-Chemical Synthesis of 3D Stacked Thin Film Metal-Oxides for All-Solid-State Li-Ion Batteries

Ultra‐Thin Lithium Silicide Interlayer for Solid‐State Lithium‐Metal Batteries

Self-Standing 3D Cathodes for All-Solid-State Thin Film Lithium Batteries with Improved Interface Kinetics

LiCoO 2 Ultrathin Layer for Uniform Lithium Deposition toward a Highly Stable Lithium Metal Anode

A "Lithium-Free" Thin-Film Battery with an Unexpected Cathode Layer

Thin-Film Lithium Cobalt Oxide for Lithium-Ion Batteries

Pulsed Laser Deposition and Characterization of Heteroepitaxial LiMn2O4/La0.5Sr0.5CoO3 Bilayer Thin Films As Model Lithium Ion Battery Cathodes

Ultrafast laser ablation of aqueous processed thick-film Li(Ni0.6Mn0.2Co0.2)O2 cathodes with 3D architectures for lithium-Ion batteries

In-situ reconstructed surface/inner-structure synergistic design enabling 4.6 V LiCoO 2 cathode for all-solid-state thin-film battery