Deposition of Diamond Film on Ferrous Alloys Substrate with Au/Cu Interlayer by HFCVD

WANG Shengwen,ZENG Xiaoshu,XU Cailu,WEI Bingqing,LIANG Ji,WU Dehai
DOI: https://doi.org/10.3321/j.issn:1000-0054.1999.11.025
1999-01-01
Abstract:Diamond film on the ferrous substrate was successfully deposited with an Au/Cu intermediate layer and carbon nanotube nucleating agent by hot filament chemical vapor deposition (HFCVD). The influence of processing parameters on the qualities of the deposited diamond film was investigated. The experimental results show that nucleating agent coating, pretreatment of the substrate and the depositing processing are the important factors for controlling the quality of deposited diamond film.
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